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Fundamental study on lithf metal oxo clusters for KrF, ArF, and electron beam lithographyographic characteristics o
https://repo.qst.go.jp/records/79723
https://repo.qst.go.jp/records/7972313df1c6b-fdcf-4b14-8ba6-3dda8d619d76
| Item type | 会議発表論文 / Conference Paper(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2020-03-30 | |||||
| タイトル | ||||||
| タイトル | Fundamental study on lithf metal oxo clusters for KrF, ArF, and electron beam lithographyographic characteristics o | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_5794 | |||||
| 資源タイプ | conference paper | |||||
| アクセス権 | ||||||
| アクセス権 | metadata only access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
| 著者 |
Yamamoto, Hiroki
× Yamamoto, Hiroki× Maekawa, Yasunari× Yamamoto, Hiroki× Maekawa, Yasunari |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | Some hybrid inorganic-organic resist materials known as metal-oxo clusters were synthesized and lithographic characteristics were investigated. In particular, the dissolution behaviors of metal oxo clusters were investigated by development analyzer. Our results indicated that the solubility of metal oxo clusters thin films decreased by the exposure to KrF, ArF and electron beam (EB). We clarified the sensitivity in Ti-based oxo clusters was higher than that of Zr-based oxo clusters in both KrF and ArF exposure. The dissolution rate in two kinds of metal oxo cluters was almost same in both KrF and ArF exposure. Furthermore, the dissolution contrast of Ti-based oxo clusters was higher compared to Zr-based oxo clusters. Metal oxo clusters resists have the potential as future negative tone photoresist and EB resist materials. | |||||
| 書誌情報 |
Proc. SPIE, Advances in Patterning Materials and Processes XXXVII 巻 11326, p. 113261W-1-113261W-6, 発行日 2020-03 |
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| DOI | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | 10.1117/12.2565717 | |||||
| 関連サイト | ||||||
| 識別子タイプ | URI | |||||
| 関連識別子 | https://www.spiedigitallibrary.org/conference-proceedings-of-spie/11326/113261W/Fundamental-study-on-lithographic-characteristics-of-metal-oxo-clusters-for/10.1117/12.2565717.full | |||||
