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Low-charge-state ion production by a laser ion source for the TIARA ion implanter
https://repo.qst.go.jp/records/78400
https://repo.qst.go.jp/records/7840021e5abd6-ab67-48e2-b9fd-ab62f7a2cd73
| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2019-12-13 | |||||
| タイトル | ||||||
| タイトル | Low-charge-state ion production by a laser ion source for the TIARA ion implanter | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | journal article | |||||
| アクセス権 | ||||||
| アクセス権 | metadata only access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
| 著者 |
Yamada, Keisuke
× Yamada, Keisuke× Kashiwagi, Hirotsugu× Keisuke, Yamada× Hirotsugu, Kashiwagi |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | Ion implanters require various kinds of heavy-ion beams in low-charge states for material science experiments. For this purpose, a laser ion source has been developed for the ion implanter at Takasaki Ion Accelerators for Advanced Radiation Application. In this study, we investigated the particle number of ions per laser pulse for each charge state in the laser-produced carbon plasma. In the experiment, the carbon plasma was generated from a graphite target using a Nd:YAG laser (1064 nm wavelength, 5 ns pulse width) at a laser energy of 37.5 mJ, 28.3 mJ, or 15.6 mJ. The particle number of ions in the plasma was evaluated from the time-integrated value of each ion-charge-state's current signal by placing the focusing lens at various positions. We found that the particle number of carbon ions was highest for singly charged ions at all laser energies, with particle number on the order of 10^10 ions obtained at a 1-m distance from the target surface. | |||||
| 書誌情報 |
Review of scientific instruments 巻 91, 号 1, p. 013305-1-013305-4, 発行日 2020-01 |
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| 出版者 | ||||||
| 出版者 | American Institute Of Physics | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 0034-6748 | |||||
| DOI | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | 10.1063/1.5128570 | |||||
| 関連サイト | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | https://doi.org/10.1063/1.5128570 | |||||
