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Development of soft x-ray laser irradiation beamline for ablation and damage study
https://repo.qst.go.jp/records/74663
https://repo.qst.go.jp/records/74663dd9f9106-0780-4545-a154-716edd40b20b
| Item type | 会議発表論文 / Conference Paper(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2019-03-12 | |||||
| タイトル | ||||||
| タイトル | Development of soft x-ray laser irradiation beamline for ablation and damage study | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_5794 | |||||
| 資源タイプ | conference paper | |||||
| アクセス権 | ||||||
| アクセス権 | metadata only access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
| 著者 |
石野, 雅彦
× 石野, 雅彦× タンフン, ヂン× 長谷川, 登× 坂上, 和之× 東口, 武史× 市丸, 智× 畑山, 雅俊× 鷲尾, 方一× 錦野, 将元× Ishino, Masahiko× Dinh, Thanhhung× Hasegawa, Noboru× Nishikino, Masaharu |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | In this paper, we report on development of the soft x-ray laser (SXRL) irradiation system at QST. The SXRL has a wavelength of 13.9 nm, and this laser wavelength is close to the exposure wavelength of 13.5 nm for the extreme ultraviolet (EUV) lithography. The irradiation system has an intensity monitor based on the Mo/Si multilayer beam splitter. This intensity monitor provides the irradiation energy onto sample surface. So it is possible to examine and confirm damage/ablation thresholds of EUV optical elements and doses for sensitivity of resist materials, which have the same specifications of those in the EUV lithography. | |||||
| 書誌情報 |
Proceedings of SPIE 巻 10905, p. 109051C-1-109051C-5, 発行日 2019-03 |
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