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Improvement study on heat resistance of multilayer-coated replica gratings
https://repo.qst.go.jp/records/72807
https://repo.qst.go.jp/records/728079ba124de-3d44-4d3e-a21a-92ba06bab2eb
| Item type | 会議発表用資料 / Presentation(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2018-06-04 | |||||
| タイトル | ||||||
| タイトル | Improvement study on heat resistance of multilayer-coated replica gratings | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_c94f | |||||
| 資源タイプ | conference object | |||||
| アクセス権 | ||||||
| アクセス権 | metadata only access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
| 著者 |
今園, 孝志
× 今園, 孝志× 西原弘晃× 浮田龍一× 笹井浩行× 長野哲也× 今園 孝志 |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | We have been developed aperiodic W/B4C multilayer-coated replica gratings for use in the tender x-ray range 2 to 4 keV. Recently, it became apparent that surface degradation was caused by baking the multilayer gratings at around 60°C. The multilayer structure has been maintained well, whereas the resin surface in which grooves are formed has been significantly deformed. Such degradation has not been observed in conventional gold-coated replica gratings as far as we know. Replica gratings made with a high glass transition temperature resin were prototyped so as to improve heat resistance of multilayer-coated replica gratings. Diffraction efficiencies before and after heat load at 95°C for 60 hours were measured. The fact that the difference in change rate between the peak values was quite slight being less than 3% indicates that the heat resistance has been improved by 30°C. | |||||
| 会議概要（会議名, 開催地, 会期, 主催者等） | ||||||
| 内容記述タイプ | Other | |||||
| 内容記述 | 13th International Conference on Synchrotron Radiation Instrumentation (SRI2018) | |||||
| 発表年月日 | ||||||
| 日付 | 2018-06-11 | |||||
| 日付タイプ | Issued | |||||
