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EUV x-ray laser ablation of materials
https://repo.qst.go.jp/records/72320
https://repo.qst.go.jp/records/72320a2273d78-ebc6-47ca-8935-a43fea963049
| Item type | 会議発表用資料 / Presentation(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2017-05-15 | |||||
| タイトル | ||||||
| タイトル | EUV x-ray laser ablation of materials | |||||
| 言語 | ||||||
| 言語 | jpn | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_c94f | |||||
| 資源タイプ | conference object | |||||
| アクセス権 | ||||||
| アクセス権 | metadata only access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
| 著者 |
石野, 雅彦
× 石野, 雅彦× 石野 雅彦 |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | To study the interactions between extreme ultraviolet (EUV) laser beam and material surfaces, we irradiated the EUV laser beam pulses having a wavelength of 13.9 nm and duration of 7 ps to various materials. With single pulse irradiation, the nanometer scale ablation hole was formed on LiF surface, and the formation of conical structures was observed on Al surface. On the Au and Cu surfaces, ripple-like structures were formed. These surface structures were induced by low fluences (~10-30 mJ/cm2). After the multiple pulse irradiation, the conical structures on Al were destroyed. On Au and Cu surfaces, it was confirmed that the development of modified structures was observed, and deep holes that seemed to be melted structures were found on the Si surface. It was concluded that EUV laser irradiation of various material surfaces causes different types of surface modifications, and the changes in the surface behaviors are attributed to the differences in the elemental properties, such as the melting points and the attenuation length of x-ray photons. | |||||
| 会議概要（会議名, 開催地, 会期, 主催者等） | ||||||
| 内容記述タイプ | Other | |||||
| 内容記述 | 光・量子ビーム科学合同シンポジウム | |||||
| 発表年月日 | ||||||
| 日付 | 2017-05-09 | |||||
| 日付タイプ | Issued | |||||
