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A Mo/Si Multilayer-Coated Photodiode Detector for Monitoring Soft X-Ray Laser Intensity

https://repo.qst.go.jp/records/72231
https://repo.qst.go.jp/records/72231
6432deb8-49a5-4c09-9c64-f15473c2548f
Item type 会議発表用資料 / Presentation(1)
公開日 2017-03-22
タイトル
タイトル A Mo/Si Multilayer-Coated Photodiode Detector for Monitoring Soft X-Ray Laser Intensity
言語
言語 eng
資源タイプ
資源タイプ識別子 http://purl.org/coar/resource_type/c_c94f
資源タイプ conference object
アクセス権
アクセス権 metadata only access
アクセス権URI http://purl.org/coar/access_right/c_14cb
著者 今園, 孝志

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WEKO 711387

今園, 孝志

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今園 孝志

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WEKO 711388

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内容記述タイプ Abstract
内容記述 A commercial X-ray photodiode detector was coated with a Mo/Si multilayer film designed for a high efficiency polarizer at soft X-ray laser (XRL) of 13.9 nm to monitor the beam intensity in real-time. Reflectivity measurements of the multilayer-coated photodiode were carried out at an angle of incidence of 45° using synchrotron radiation. The s-polarized reflectivity was evaluated to be 44% at 13.9 nm wavelength, which was detected by another photodiode detector without multilayer coating. The transmitted and absorbed light was measured as the current of the multilayer-coated photodiode detector. A very strong positive correlation of 0.999 was observed between the two photodiode detectors. Next, reflectivity measurements using the XRL were also performed, and the correlation coefficient was 0.961. The above results indicate that the multilayer-coated photodiode detector can be utilized for shot-by-shot monitoring of the fluctuating XRL beam intensity. The details of the multilayer-coated photodiode detector and its application to absolute reflectivity measurements and polarization analysis using the XRL will be reported in this conference.
会議概要(会議名, 開催地, 会期, 主催者等)
内容記述タイプ Other
内容記述 15th International Conference on X-Ray Lasers (ICXRL2016)
発表年月日
日付 2016-05-24
日付タイプ Issued
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