WEKO3
-
RootNode
アイテム
Numerical analysis of particle emission from laser irradiated tin targets for the optimization of the EUV source
https://repo.qst.go.jp/records/72169
https://repo.qst.go.jp/records/72169f3691e3f-7b2f-4dc3-abd8-556229fef7d5
| Item type | 会議発表用資料 / Presentation(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2017-03-08 | |||||
| タイトル | ||||||
| タイトル | Numerical analysis of particle emission from laser irradiated tin targets for the optimization of the EUV source | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_c94f | |||||
| 資源タイプ | conference object | |||||
| アクセス権 | ||||||
| アクセス権 | metadata only access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
| 著者 |
佐々木, 明
× 佐々木, 明× 砂原淳× 古河裕之× 西原功修× 西川亘× 佐々木 明 |
|||||
| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | Optimization pre-plasma is critical to obtain high output power from the laser pumped plasma (LPP) extreme ultra-violet (EUV) light source. We investigate fragmentation of tin droplet targets by the pre-pulse laser irradiation. We develop a hydrodynamics model with the equation of state (EOS) of tin, which describes liquid to gas transition, and algorithms for mesh reorganization, to investigate the generation of particles through the evaporation, condensation as well as by shock wave caused by the irradiation of short laser pulse. We will discuss the physical effect and numerical method to include processes that determine dynamics of the particles, such as surface tension for bubbles and clusters as well as the interaction between the laser and particles. | |||||
| 会議概要（会議名, 開催地, 会期, 主催者等） | ||||||
| 内容記述タイプ | Other | |||||
| 内容記述 | SPIE Advanced Lithography会議、参加とポスター発表 | |||||
| 発表年月日 | ||||||
| 日付 | 2017-03-01 | |||||
| 日付タイプ | Issued | |||||
