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Influence of short pulse duration of carbon-dioxide lasers on extreme ultraviolet emission from laser produced plasmas
https://repo.qst.go.jp/records/49470
https://repo.qst.go.jp/records/49470746df863-ca89-47d0-87fa-6d5827a72c4a
| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2019-01-17 | |||||
| タイトル | ||||||
| タイトル | Influence of short pulse duration of carbon-dioxide lasers on extreme ultraviolet emission from laser produced plasmas | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | journal article | |||||
| アクセス権 | ||||||
| アクセス権 | metadata only access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
| 著者 |
Amano, Reiho
× Amano, Reiho× タンフン, ヂン× Sasanuma, Atsushi× Arai, Goki× Hara, Hiroyuki× Fujii, Yusuke× Hatano, Tadashi× Ejima, Takeo× Jiang, Weihua× Sunahara, Atsushi× Takahashi, Akihiko× Nakamura, Daisuke× Okada, Tatsuo× Sakaue, Kazuyuki× Miura, Taisuke× Gerry, O’Sullivan× Higashiguchi, Takeshi× Dinh, Thanhhung |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | We describe the production of mid-infrared (mid-IR) short carbon dioxide (CO2) laser pulses with variable durations from 3 to 15ns at a maximum pulse energy of 150 mJ/pulse using a germanium (Ge) substrate semiconductor switch and a multipass amplifier. The results clearly show the spectral profiles possess all of the desired characteristics as well as the possibility of obtaining an energy conversion efficiency close to the theoretical upper limit. It is also shown that it is necessary to irradiate with pulse durations less than 10ns to optimize efficient EUV emission using Sn and Gd targets. | |||||
| 書誌情報 |
Japanese Journal of Applied Physics 巻 57, 号 7, p. 070311, 発行日 2018-07 |
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| 出版者 | ||||||
| 出版者 | The Japan Society of Applied Physics | |||||
| DOI | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | 10.7567/JJAP.57.070311 | |||||
| 関連サイト | ||||||
| 識別子タイプ | URI | |||||
| 関連識別子 | http://iopscience.iop.org/article/10.7567/JJAP.57.070311/pdf | |||||
