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Analysis of reflection signal from EUV multilayer mirror for irradiation-induced damage study
https://repo.qst.go.jp/records/48935
https://repo.qst.go.jp/records/48935c0ed9df4-1ef3-437b-b07a-581d86bfc4ea
| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2018-05-08 | |||||
| タイトル | ||||||
| タイトル | Analysis of reflection signal from EUV multilayer mirror for irradiation-induced damage study | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | journal article | |||||
| アクセス権 | ||||||
| アクセス権 | metadata only access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
| 著者 |
石野, 雅彦
× 石野, 雅彦× Ichimaru, Satoshi× Hatayama, Masatoshi× 長谷川, 登× Oku, Satoshi× 錦野, 将元× 石野 雅彦× 長谷川 登× 錦野 将元 |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | To utilize intense X-ray pulse sources for scientific researches and industrial applications, it is important to study the damage mechanism caused by X-ray irradiation . The soft X-ray laser (SXRL) pulses can make damages on an extreme ultraviolet (EUV) multilayer mirror . When the SXRL pulse irradiates onto the EUV multilayer mirror, a part of input energy is reflected. The SXRL beam irradiated to a damage part, in this case, the reflected intensity is modified. If the pulse width is longer than process time of damage growth, we can observe the modulated intensity, which has been affected by the damage structure formed by the former part of duration. Then, it will be possible to confirm the start time of damage formation in the multilayer structure by use of X-ray streak camera technique. | |||||
| 書誌情報 |
Proceeding of The 15th International Conference on X-Ray Lasers 巻 202, p. 315-319, 発行日 2018-05 |
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| 出版者 | ||||||
| 出版者 | Springer | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 0930-8989 | |||||
| DOI | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | 10.1007/978-3-319-73025-7_47 | |||||
