| アイテムタイプ |
会議発表論文 / Conference Paper(1) |
| 公開日 |
2026-05-25 |
| タイトル |
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タイトル |
Research and development of an ultrahigh-precision single-ion implanter |
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言語 |
en |
| 言語 |
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言語 |
eng |
| 資源タイプ |
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資源タイプ識別子 |
http://purl.org/coar/resource_type/c_5794 |
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資源タイプ |
conference paper |
| アクセス権 |
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アクセス権 |
metadata only access |
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アクセス権URI |
http://purl.org/coar/access_right/c_14cb |
| 著者 |
Yuri Yosuke
Hosaka Koichi
Miyawaki Nobumasa
Ishii Yasuyuki
Hosoya Seiji
Kashiwagi Hirotsugu
Yamagata Ryohei
Onoda Shinobu
Muroo Kento
伊藤清一
岡本宏己
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| 抄録 |
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内容記述タイプ |
Abstract |
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内容記述 |
Ion implantation is an accelerator-based technology used to create defects and introducing impurities into solid materials. A research and development study is currently underway toward ultrahigh-precision single-ion implantation using laser-cooling techniques at Takasaki Institute, National Institutes for Quantum Science and Technology. To achieve this, we incorporate a linear Paul trap as an ultracold single-ion source, where trapped ions can be made “Coulomb-crystallized” through Doppler laser cooling. In our scheme, nitrogen or silicon ions, useful for ion implantation to create color centers in materials, are sympathetically cooled through Coulomb collisions by co-trapping them with laser-cooled calcium ions to form a two-component crystal. These cold ions are then selectively extracted from the trap to be accelerated and focused through a 50-kV electrostatic bipotential-lens system. Our goal is to achieve beam focusing for ultrahigh-precision implantation on the order of 10 nm. The implanter system has already been assembled, and the commissioning is currently ongoing to enable single-ion extraction using a Coulomb crystal. In these proceedings, we describe the scheme for selective ion extraction and nanobeam focusing based on multiparticle simulations and briefly report recent progress in system implementation. |
| 書誌情報 |
Proceedings of the 15th International Workshop on Beam Cooling and Related Topics
p. 8-11,
発行日 2026-05
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| ISSN |
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収録物識別子タイプ |
ISSN |
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収録物識別子 |
2226-0374 |
| DOI |
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識別子タイプ |
DOI |
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関連識別子 |
10.18429/JACoW-COOL2025-MOD2 |
