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Research and development of an ultrahigh-precision single-ion implanter
https://repo.qst.go.jp/records/2002268
https://repo.qst.go.jp/records/2002268bafd0a47-2987-49e5-a3a9-716a398e1b2d
| アイテムタイプ | 会議発表用資料 / Presentation(1) | |||||||
|---|---|---|---|---|---|---|---|---|
| 公開日 | 2025-11-04 | |||||||
| タイトル | ||||||||
| タイトル | Research and development of an ultrahigh-precision single-ion implanter | |||||||
| 言語 | en | |||||||
| 言語 | ||||||||
| 言語 | eng | |||||||
| 資源タイプ | ||||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_c94f | |||||||
| 資源タイプ | conference presentation | |||||||
| 著者 |
百合 庸介
× 百合 庸介
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| 抄録 | ||||||||
| 内容記述 | Ion implantation is an accelerator technology essential for creating defects or introducing impurities into materials. A research and development study is currently underway at QST Takasaki Institute toward ultrahighprecision single-ion implantation based on laser-cooling techniques. To achieve this, we incorporate a linear Paul trap as an ultracold single-ion source, where trapped ions can be cooled to the order of mK or even “Coulomb-crystallized”by Doppler laser cooling. In our scheme, N or Si ions, useful for ion implantation to create color centers, are sympathetically cooled down to the mK range through Coulomb collisions by co-trapping them with laser-cooled Ca ions. Then, the ions are extracted selectively from the trap to be accelerated and focused through a 50-kV electrostatic bipotential lens system. We aim to focus the ions on the order of 10 nm for ultrahigh-precision implantation. The implantation system has already been assembled, and the commissioning is currently underway to enable ion extraction using a Coulomb crystal and focusing extracted cold ions. We present the status of system development and outline the scheme for selective ion extraction and nanobeam focusing based on multiparticle simulations. | |||||||
| 会議概要（会議名, 開催地, 会期, 主催者等） | ||||||||
| 内容記述 | 15th International Workshop on Beam Cooling and Related Topics (COOL'25) | |||||||
| 発表年月日 | ||||||||
| 日付 | 2025-10-27 | |||||||
