WEKO3
アイテム
Transient Swelling During Development of Poly(methyl methacrylate) Resist
https://repo.qst.go.jp/records/2001502
https://repo.qst.go.jp/records/2001502784ac8b7-e6b1-40ba-9208-055df306465b
| アイテムタイプ | 学術雑誌論文 / Journal Article(1) | |||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| 公開日 | 2025-02-20 | |||||||||||||
| タイトル | ||||||||||||||
| タイトル | Transient Swelling During Development of Poly(methyl methacrylate) Resist | |||||||||||||
| 言語 | ja | |||||||||||||
| 言語 | ||||||||||||||
| 言語 | jpn | |||||||||||||
| 資源タイプ | ||||||||||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||||||||||
| 資源タイプ | journal article | |||||||||||||
| 著者 |
誉田 明宏
× 誉田 明宏
× 山本 洋揮
× Shusuke Yoshitake
× Takahiro Kozawa
|
|||||||||||||
| 抄録 | ||||||||||||||
| 内容記述タイプ | Abstract | |||||||||||||
| 内容記述 | For the realization of further miniaturization at scale of 10 nm and below in semiconductor devices, it is essential to understand the dissolution kinetics of resist films in developer. In this study, the change in molecular weight and dissolution kinetics induced by ionizing radiation in poly(methyl methacrylate) (PMMA) resist films were studied using a quartz crystal microbalance method and gel permeation chromatography. The weight-averaged molecular weight Mw was changed from 50000 to 996000. Three types of developers (o-xylene and 1:3 and 1:7 mixing solutions of methyl isobutyl ketone and isopropanol) were examined. The kinetics during the development of PMMA films was classified into three patterns. In low Mw region, only dissolution was observed. In middle Mw region, both swelling and dissolution were observed. In high Mw region, only swelling was observed. The boundaries between regions were dependent of the developer and independent of the initial molecular weight of PMMA. |
|||||||||||||
| 書誌情報 |
Journal of Photopolymer Science and Technology 巻 37, 号 1, p. 8188, 発行日 2024-02 |
|||||||||||||
| DOI | ||||||||||||||
| 識別子タイプ | DOI | |||||||||||||
| 関連識別子 | 10.2494/photopolymer.37.81 | |||||||||||||
