WEKO3
アイテム
Generation of plasma from multiple targets by laser ion source for TIARA ion implanter
https://repo.qst.go.jp/records/2001234
https://repo.qst.go.jp/records/2001234070e0403-85f5-4d0c-aa99-a74edd880aeb
| アイテムタイプ | 学術雑誌論文 / Journal Article(1) | |||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|
| 公開日 | 2024-07-08 | |||||||||||
| タイトル | ||||||||||||
| タイトル | Generation of plasma from multiple targets by laser ion source for TIARA ion implanter | |||||||||||
| 言語 | en | |||||||||||
| 言語 | ||||||||||||
| 言語 | eng | |||||||||||
| 資源タイプ | ||||||||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||||||||
| 資源タイプ | journal article | |||||||||||
| 著者 |
Yamada Keisuke
× Yamada Keisuke
× Kashiwagi Hirotsugu
× Hosoya Seiji
|
|||||||||||
| 抄録 | ||||||||||||
| 内容記述タイプ | Abstract | |||||||||||
| 内容記述 | We investigated a laser ion source for use as an ion source for the ion implanter in Takasaki Ion Accelerators for Advanced Radiation Application to increase the number of ion species that can be produced and to enable rapid switching of ion species. Herein, we analyzed the charge state distribution of ions in a laser plasma generated through irradiation of graphite, titanium, copper, and tantalum targets with 30 mJ Nd:YAG laser to determine the particle number of low-charge ions per pulse at 1.1 m from the target. The particle number of singly charged ions could be increased by adjusting the laser power density. For carbon, titanium, and tantalum, the particle numbers were in the order of 10^10 ions per pulse, whereas for copper, the particle numbers were in the order of 10^9, lower than for other target materials. | |||||||||||
| 書誌情報 |
Journal of Physics; Conference Series 巻 2743, p. 012094, 発行日 2024-05 |
|||||||||||
| 出版者 | ||||||||||||
| 出版者 | IOP science | |||||||||||
| DOI | ||||||||||||
| 識別子タイプ | DOI | |||||||||||
| 関連識別子 | 10.1088/1742-6596/2743/1/012094 | |||||||||||
