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Ti beam extraction from a laser plasma focused by a magnetic field of a solenoid
https://repo.qst.go.jp/records/2001229
https://repo.qst.go.jp/records/200122919db593c-2456-46ae-941d-c4be192c204e
| アイテムタイプ | 学術雑誌論文 / Journal Article(1) | |||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|
| 公開日 | 2024-06-27 | |||||||||||
| タイトル | ||||||||||||
| タイトル | Ti beam extraction from a laser plasma focused by a magnetic field of a solenoid | |||||||||||
| 言語 | ja | |||||||||||
| 言語 | ||||||||||||
| 言語 | jpn | |||||||||||
| 資源タイプ | ||||||||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||||||||
| 資源タイプ | journal article | |||||||||||
| 著者 |
柏木 啓次
× 柏木 啓次
× 山田 圭介
× 細谷 青児
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| 抄録 | ||||||||||||
| 内容記述タイプ | Abstract | |||||||||||
| 内容記述 | Laser ion sources (LISs) have the advantages of generating plasma from various solid targets and quickly switching the ion species by changing the target. Given these features, we aimed to develop a LIS for an ion implanter that requires a wide variety of ion species. The plasma generated by the LIS diffuses three-dimensionally with a wide angular distribution, such that only a small fraction of the generated ions reaching the extraction electrode aperture is extracted as a beam. With this procedure, the beam intensity is insufficient for the implanter LIS, which uses a laser with lower energy than the conventional LIS. To obtain a higher beam intensity by increasing the number of ions reaching the beam extraction electrode aperture, a plasma transport system with a linear solenoid magnet was installed immediately after the LIS chamber to focus the plasma by a magnetic field. In the Ti plasma focusing experiment using this system, the beam intensity increased up to 6.7 times compared to that of the case without a magnetic field. This result demonstrates that plasma focusing by a magnetic field is effective for increasing the beam intensity. | |||||||||||
| 書誌情報 |
Journal of Physics: Conference Series 巻 2743, p. 012062, 発行日 2024-05 |
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| 出版者 | ||||||||||||
| 出版者 | IOPscience | |||||||||||
| DOI | ||||||||||||
| 識別子タイプ | DOI | |||||||||||
| 関連識別子 | 10.1088/1742-6596/2743/1/012062 | |||||||||||
