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Dependence of Dissolution Kinetics of Main-Chain Scission Type Resists on Molecular
https://repo.qst.go.jp/records/2000507
https://repo.qst.go.jp/records/200050712a5c115-dde4-4156-a858-310115a5aabc
| アイテムタイプ | 学術雑誌論文 / Journal Article(1) | |||||||||||
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| 公開日 | 2024-06-07 | |||||||||||
| タイトル | ||||||||||||
| タイトル | Dependence of Dissolution Kinetics of Main-Chain Scission Type Resists on Molecular | |||||||||||
| 言語 | en | |||||||||||
| 言語 | ||||||||||||
| 言語 | eng | |||||||||||
| 資源タイプ | ||||||||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||||||||
| 資源タイプ | journal article | |||||||||||
| 著者 |
Akihiro konda
× Akihiro konda
× Yamamoto Hiroki
× Shusuke Yoshitake
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| 抄録 | ||||||||||||
| 内容記述タイプ | Abstract | |||||||||||
| 内容記述 | The dissolution kinetics and molecular weight in main-chain scission type resists such as poly(methyl methacrylate) (PMMA) and ZEP520A were investigated using a quartz crystal microbalance (QCM) method and a Gel Permeation Chromatography (GPC) to clarify the effects of the molecular weight after polymer degradation on the dissolution kinetics. G-values of main chain scissions in PMMA and ZEP520A are estimated using GPC measurement. The G-value of ZEP520A showed higher G-values than that of PMMA. There are three molecular weight regions in PMMA, whereas there are only two molecular weight regions in ZEP 520A. The dissolution behavior depends on molecular weight after polymer degradation in both PMMA and ZEP 520A. These results indicate that ZEP520A is better to be better lithographic performance. | |||||||||||
| 書誌情報 |
Journal of Photopolymer Science and Technology 巻 35, 号 1, p. 1, 発行日 2022-12 |
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| 出版者 | ||||||||||||
| 出版者 | The Society of Photopolymer Science and Technology | |||||||||||
| ISSN | ||||||||||||
| 収録物識別子タイプ | ISSN | |||||||||||
| 収録物識別子 | 1349-6336 | |||||||||||
| DOI | ||||||||||||
| 識別子タイプ | DOI | |||||||||||
| 関連識別子 | 10.2494/photopolymer.35.1 | |||||||||||
