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Development of a versatile micro-focused angle-resolved photoemission spectroscopy system with Kirkpatrick-Baez mirror optics
https://repo.qst.go.jp/records/85889
https://repo.qst.go.jp/records/85889fbe88401-7201-43a8-b5d1-77909c554824
Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2022-03-04 | |||||
タイトル | ||||||
タイトル | Development of a versatile micro-focused angle-resolved photoemission spectroscopy system with Kirkpatrick-Baez mirror optics | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
アクセス権 | ||||||
アクセス権 | metadata only access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
著者 |
Kitamura, Miho
× Kitamura, Miho× Souma, Seigo× Honma, Asuka× Wakabayashi, Daisuke× Tanaka, Hirokazu× Toyoshima, Akio× Amemiya, Kenta× Kawakami, Tappei× Sugawara, Katsuaki× Kosuke Nakayama× Yoshimatsu, Kohei× Kumigashira, Hiroshi× Sato, Takafumi× Koji, Horiba× Koji, Horiba |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | KEKフォトンファクトリーのBL-28Aにおいて、Kirkpatrick-Baezミラー光学系を用いた放射光集光ビームをベースに、汎用性の高いマイクロARPESシステムを開発した。Si上のAuフォトリソグラフィーパターンの空間マッピングにより、試料位置でのビームスポットサイズは10m(水平)×12m(垂直)を達成していることを確認した。マイクロビームと高精度な試料移動システムを用いることで、空間分解した正確なバンド構造マッピングが可能となる。 | |||||
書誌情報 |
Review of Scientific Instruments 巻 93, p. 033906-1-033906-8, 発行日 2022-03 |
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出版者 | ||||||
出版者 | American Institute of Physics | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0034-6748 | |||||
DOI | ||||||
識別子タイプ | DOI | |||||
関連識別子 | 10.1063/5.0074393 | |||||
関連サイト | ||||||
識別子タイプ | URI | |||||
関連識別子 | https://aip.scitation.org/doi/abs/10.1063/5.0074393 |