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Development of an apparatus for Bragg coherent X-ray diffraction imaging, and its application to the three dimensional imaging of BaTiO3 nano-crystals
利用統計を見る
We report the developmental status of the apparatus of the Bragg coherent X-ray diffraction imaging (Bragg-CDI) method at BL22XU of SPring-8 and show some typical results of the three dimensional imaging of BaTiO$_{3}$ fine particles obtained by using the apparatus. We chose two types of samples, cubic-like shaped sample and sample rich in curved surfaces. The shape and the size of the particles were expectedly reconstructed. They are approximately consistent with the results by the SEM measurements. The information of the inside and backside could be obtained, which could not be obtained by the SEM measurements. The size of the particle which we can measure is about to reach to 100~nm or smaller, now. The Bragg-CDI method is a powerful technique to investigate the crystalline particles, furthermore will open the avenue to measure particles in devices such as inside the MLCC devices which cannot be measured by using the electron beam.
雑誌名
Japanese Journal of Applied Physics (Special Issues: Ferroelectric Materials and Their Applications)
Development of an apparatus for Bragg coherent X-ray diffraction imaging, and its application to the three dimensional imaging of BaTiO3 nano-crystals
