{"created":"2023-05-15T15:02:42.434286+00:00","id":85019,"links":{},"metadata":{"_buckets":{"deposit":"365dece5-0def-4848-8dd6-703511025233"},"_deposit":{"created_by":1,"id":"85019","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"85019"},"status":"published"},"_oai":{"id":"oai:repo.qst.go.jp:00085019","sets":["1"]},"author_link":["1033681","1033676","1033683","1033679","1033680","1033684","1033685","1033682","1033677","1033674","1033675","1033678","1033673"],"item_8_biblio_info_7":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2022-03","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"76","bibliographicPageStart":"70","bibliographicVolumeNumber":"53","bibliographic_titles":[{"bibliographic_title":" X線分析の進歩"}]}]},"item_8_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"汎用軟X線発光分光用途の回折格子分光器に搭載する回折格子の設計では，一般に可能な限り広い波長範囲で分解能や回折効率（DE）などの基本的な性能を向上させるように設計する．最近，著者らは開口数と回折効率の積で定義され，分析感度と相関するスペクトルフラックス（SF）という新しい分光光学系の評価指標を考案した．本研究では，数値計算により入射角や回折格子表面の反射膜構造などをLi-K発光（54.3 eV，22.83 nm）近辺において最適化することにより，DFとSFを増加させる回折格子と分光器の設計を行った．その結果，回折格子表面の金属層の上に一定の厚さの炭素系層を積層した新設計の回折格子は，従来の入射角よりも小さい入射角で 開口数が大きくなると共に 回折効率も高くなり，従来設計の回折格子を搭載する分光器と比較して，Li-K発光でSFが約8倍となるほか，広い波長範囲で高いSFを示すことが判った．　","subitem_description_type":"Abstract"}]},"item_8_publisher_8":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"アクネ技術センター"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"metadata only access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_14cb"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"小池, 雅人"}],"nameIdentifiers":[{"nameIdentifier":"1033673","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"村野, 孝訓"}],"nameIdentifiers":[{"nameIdentifier":"1033674","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"越谷, 翔悟"}],"nameIdentifiers":[{"nameIdentifier":"1033675","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"羽多野, 忠"}],"nameIdentifiers":[{"nameIdentifier":"1033676","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"ピロジコフ, アレキサンダー"}],"nameIdentifiers":[{"nameIdentifier":"1033677","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"垣尾, 翼"}],"nameIdentifiers":[{"nameIdentifier":"1033678","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"林, 信和"}],"nameIdentifiers":[{"nameIdentifier":"1033679","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"長野, 哲也"}],"nameIdentifiers":[{"nameIdentifier":"1033680","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"近藤, 公伯"}],"nameIdentifiers":[{"nameIdentifier":"1033681","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"寺内, 正己"}],"nameIdentifiers":[{"nameIdentifier":"1033682","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Masato, Koike","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"1033683","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Pirozhkov, Alexander","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"1033684","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Kiminori, Kondo","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"1033685","nameIdentifierScheme":"WEKO"}]}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"極端紫外 (EUV) 域低入射角高回折効率ラミナー型回折格子の設計","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"極端紫外 (EUV) 域低入射角高回折効率ラミナー型回折格子の設計"}]},"item_type_id":"8","owner":"1","path":["1"],"pubdate":{"attribute_name":"公開日","attribute_value":"2022-01-31"},"publish_date":"2022-01-31","publish_status":"0","recid":"85019","relation_version_is_last":true,"title":["極端紫外 (EUV) 域低入射角高回折効率ラミナー型回折格子の設計"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-05-15T17:36:08.754699+00:00"}