@article{oai:repo.qst.go.jp:00084555,
 author = {M. Barysheva, M. and A. Garakhin, S. and O. Kolesnikov, A. and Pirozhkov, Alexander and N. Polkovnikov, V. and N. Ragozin, E. and N. Shatokhin, A. and M. Smertin, R. and V. Svechnikov, M. and A. Vishnyakov, E. and Pirozhkov, Alexander},
 issue = {9},
 journal = {Optical Materials Express},
 month = {Sep},
 note = {Broadband Mo/Be multilayer structures were designed for maximum uniform normal-incidence reflectivity in a broad range of 111–138 Å, which lies near and beyond the L2,3 absorption edge of Si. A comparison was made of the capabilities of two classes of aperiodic structures and of so-called “stack” structures, which are composed of several periodic structures with different periods stacked one over the other. Six-stack Mo/Be 80-layer structures were synthesized on concave (R = 1 m) superpolished fused silica substrates. Their absolute reflectivity was measured at 13% – 14% in the 111–138 Å optimization range using a laboratory reflectometer with a laser-plasma radiation source. The normal-incidence reflection spectra of the mirrors were recorded in the configuration of a transmission-grating spectrograph using the slowly varying quasicontinuum of a laser-driven tungsten plasma. Comparing the reflectivity data with the reflection spectra recorded with a CCD permitted estimating a decrease in the detector responsivity beyond the Si L-edge. The broadband normal-incidence multilayer mirrors facilitate the development of a high-resolution imaging spectrograph covering a usable range about the Si L-edge to characterize, for instance, the L-edge fine structures and chemical states. These mirrors will also find use in imaging solar instruments with a high spectral resolution operating aboard a spacecraft and in laboratory instruments for plasma diagnostics.},
 pages = {3038--3048},
 title = {Broadband normal-incidence mirrors for a range of 111–138 Å based on an a-periodic Mo/Be multilayer structure},
 volume = {11},
 year = {2021}
}