{"created":"2023-05-15T15:01:27.474250+00:00","id":83372,"links":{},"metadata":{"_buckets":{"deposit":"d1d62f81-67fc-4a16-a81d-7b7f89562ba9"},"_deposit":{"created_by":1,"id":"83372","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"83372"},"status":"published"},"_oai":{"id":"oai:repo.qst.go.jp:00083372","sets":["10:28"]},"author_link":["1002297","1002293","1002291","1002290","1002288","1002295","1002294","1002296","1002289","1002292"],"item_10005_date_7":{"attribute_name":"発表年月日","attribute_value_mlt":[{"subitem_date_issued_datetime":"2021-10-29","subitem_date_issued_type":"Issued"}]},"item_10005_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"回折格子分光器を用いた軟Ｘ線発光分光法は高感度微量元素分析への期待が高い。我々は低入射角配置の回折格子で発光収率と回折効率を同時に増大させる分光感度向上を目指している。本講演では183 eV付近のボロンK発光に対する高感度化に成功した例を紹介する。基板溝形状や表面反射材など回折格子に含まれる複数パラメーターの最適化を簡単にするため、反射材の物質選択、入射角と溝深さとデューティー比、反射材の膜厚の順に最適化を行った。高回折効率コート材料の物質を選ぶに際し、解析的な考察が容易なバルク反射率を判断基準とした。その結果に基づき、化学的に安定なLaF3を用いたNi/LaF3膜とLa膜にC保護膜を付加したNi/La/C膜について回折格子パラメーターの最適化設計を行い、回折格子の作製と回折効率の実測を行った。分光器の分光感度と相関がある集光効率と回折効率の積で定義されるspectral fluxの実測値では、入射角87.07°でのNiコート回折格子の値0.138を基準にすると、Ni/LaF3膜とNi/La/C膜を付加した場合、入射角84°で最大値をとり、それぞれ0.548、0.660であった。これはそれぞれ4.0倍、4.8倍のspectral fluxの増大に相当する。","subitem_description_type":"Abstract"}]},"item_10005_description_6":{"attribute_name":"会議概要（会議名, 開催地, 会期, 主催者等）","attribute_value_mlt":[{"subitem_description":"Optics ＆ Photonics Japan 2021","subitem_description_type":"Other"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"metadata only access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_14cb"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"羽多野, 忠"}],"nameIdentifiers":[{"nameIdentifier":"1002288","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"小池, 雅人"}],"nameIdentifiers":[{"nameIdentifier":"1002289","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"ピロジコフ, アレキサンダー"}],"nameIdentifiers":[{"nameIdentifier":"1002290","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"西原, 弘晃"}],"nameIdentifiers":[{"nameIdentifier":"1002291","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"林, 信和"}],"nameIdentifiers":[{"nameIdentifier":"1002292","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"笹井, 浩行"}],"nameIdentifiers":[{"nameIdentifier":"1002293","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"長野, 哲也"}],"nameIdentifiers":[{"nameIdentifier":"1002294","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"寺内, 正己"}],"nameIdentifiers":[{"nameIdentifier":"1002295","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Masato, Koike","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"1002296","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Pirozhkov, Alexander","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"1002297","nameIdentifierScheme":"WEKO"}]}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"conference object","resourceuri":"http://purl.org/coar/resource_type/c_c94f"}]},"item_title":"低入射角・高回折効率ラミナー型回折格子の開発とボロンK発光分析への応用","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"低入射角・高回折効率ラミナー型回折格子の開発とボロンK発光分析への応用"}]},"item_type_id":"10005","owner":"1","path":["28"],"pubdate":{"attribute_name":"公開日","attribute_value":"2021-09-16"},"publish_date":"2021-09-16","publish_status":"0","recid":"83372","relation_version_is_last":true,"title":["低入射角・高回折効率ラミナー型回折格子の開発とボロンK発光分析への応用"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-05-15T19:34:43.585085+00:00"}