{"created":"2023-05-15T15:01:21.281496+00:00","id":83234,"links":{},"metadata":{"_buckets":{"deposit":"d6ff5056-36fd-47ce-a1a2-ef8198cfae7a"},"_deposit":{"created_by":1,"id":"83234","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"83234"},"status":"published"},"_oai":{"id":"oai:repo.qst.go.jp:00083234","sets":["10:29"]},"author_link":["997997","998001","998003","998000","998005","998006","997998","997999","998004","998002","997996"],"item_10005_date_7":{"attribute_name":"発表年月日","attribute_value_mlt":[{"subitem_date_issued_datetime":"2021-10-13","subitem_date_issued_type":"Issued"}]},"item_10005_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"電子顕微鏡と組み合わせた軟X 線回折格子発光分光器(SXES)は, 局所領域からの発光スペクトルのマッピング計測が可能で，多元物質の分布計測に利用されているが，分析感度の向上と共に測定時間の短縮が大きな課題になっている．そこで，回折格子に取り込む光量(Spectral flux)と回折効率の増大を図るため，回折格子溝形状と入射角の最適化や表面への新たな付加膜について研究を行っている．これまで，Ni表面の回折格子面上にLa系物質を堆積しB-K 発光を中心に回折格子の上記性能を向上させた結果については既に報告した．本研究ではLi-K発光（54.3 eV，22.83 nm）を中心に同様の検討を数値計算により行ったので報告する．回折格子はラミナー型で，刻線密度：1200 本/mm，デューティ比：0.3，溝深さ：16 nm，表面物質：Auとした．22.83 nmにおいて高い反射率を示したB4Cを上記の回折格子面上に36 nm厚で積層した回折格子で入射角が78.28°の場合の回折効率の波長依存性を数値計算で調べた．.その結果、80°以下の比較的小さい入射角でも10nm～35nmの広い波長範囲で20％以上の高い回折効率を示すことが判った.\n","subitem_description_type":"Abstract"}]},"item_10005_description_6":{"attribute_name":"会議概要（会議名, 開催地, 会期, 主催者等）","attribute_value_mlt":[{"subitem_description":"2021年度 日本分光学会年次講演会","subitem_description_type":"Other"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"metadata only access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_14cb"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"小池, 雅人"}],"nameIdentifiers":[{"nameIdentifier":"997996","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"羽多野, 忠"}],"nameIdentifiers":[{"nameIdentifier":"997997","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"村野, 孝訓"}],"nameIdentifiers":[{"nameIdentifier":"997998","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"越谷, 翔悟"}],"nameIdentifiers":[{"nameIdentifier":"997999","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"ピロジコフ, アレキサンダー"}],"nameIdentifiers":[{"nameIdentifier":"998000","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"垣尾, 翼"}],"nameIdentifiers":[{"nameIdentifier":"998001","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"林, 信和"}],"nameIdentifiers":[{"nameIdentifier":"998002","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"長野, 哲也"}],"nameIdentifiers":[{"nameIdentifier":"998003","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"寺内, 正己"}],"nameIdentifiers":[{"nameIdentifier":"998004","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Masato, Koike","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"998005","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Pirozhkov, Alexander","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"998006","nameIdentifierScheme":"WEKO"}]}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"conference object","resourceuri":"http://purl.org/coar/resource_type/c_c94f"}]},"item_title":"極端紫外 (EUV) 域広開口高回折効率ラミナー型回折格子の開発","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"極端紫外 (EUV) 域広開口高回折効率ラミナー型回折格子の開発"}]},"item_type_id":"10005","owner":"1","path":["29"],"pubdate":{"attribute_name":"公開日","attribute_value":"2021-08-17"},"publish_date":"2021-08-17","publish_status":"0","recid":"83234","relation_version_is_last":true,"title":["極端紫外 (EUV) 域広開口高回折効率ラミナー型回折格子の開発"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-05-15T19:50:38.645665+00:00"}