{"created":"2023-05-15T15:01:08.794309+00:00","id":82952,"links":{},"metadata":{"_buckets":{"deposit":"06623e9f-a55b-45dd-b09d-1cc81862e299"},"_deposit":{"created_by":1,"id":"82952","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"82952"},"status":"published"},"_oai":{"id":"oai:repo.qst.go.jp:00082952","sets":["7"]},"author_link":["994497","994499","994495","994515","994512","994506","994502","994509","994496","994514","994498","994503","994507","994516","994511","994517","994508","994494","994510","994500","994513","994505","994501","994504"],"item_10004_biblio_info_7":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2021-06","bibliographicIssueDateType":"Issued"},"bibliographic_titles":[{"bibliographic_title":"連携重点研究2020(令和2)年度成果報告書"}]}]},"item_10004_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"Ion beam irradiation of Si induces the formation of fine structures on the surface by sputtering. In this study, the energy \ndependence of the formed structures was investigated by electron microscopy using fast C60 cluster ion beams. The size \nof the structures increases with increasing energy.","subitem_description_type":"Abstract"}]},"item_10004_relation_17":{"attribute_name":"関連サイト","attribute_value_mlt":[{"subitem_relation_type_id":{"subitem_relation_type_id_text":"http://www.tokai.t.u-tokyo.ac.jp/kaihoken/seikahoukoku/seika2020/","subitem_relation_type_select":"URI"}}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"metadata only access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_14cb"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"新田, 紀子"}],"nameIdentifiers":[{"nameIdentifier":"994494","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"大石脩人"}],"nameIdentifiers":[{"nameIdentifier":"994495","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"土田, 秀次"}],"nameIdentifiers":[{"nameIdentifier":"994496","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"冨田, 成夫"}],"nameIdentifiers":[{"nameIdentifier":"994497","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"笹, 公和"}],"nameIdentifiers":[{"nameIdentifier":"994498","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"平田, 浩一"}],"nameIdentifiers":[{"nameIdentifier":"994499","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"柴田, 裕実"}],"nameIdentifiers":[{"nameIdentifier":"994500","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"平野, 貴美"}],"nameIdentifiers":[{"nameIdentifier":"994501","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"山田, 圭介"}],"nameIdentifiers":[{"nameIdentifier":"994502","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"千葉, 敦也"}],"nameIdentifiers":[{"nameIdentifier":"994503","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"斎藤, 勇一"}],"nameIdentifiers":[{"nameIdentifier":"994504","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"鳴海, 一雅"}],"nameIdentifiers":[{"nameIdentifier":"994505","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"星野, 靖"}],"nameIdentifiers":[{"nameIdentifier":"994506","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Noriko, Nitta","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"994507","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Hidetsugu, Tsuchida","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"994508","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Shigeo, Tomita","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"994509","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Sasa, Kimikazu","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"994510","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Koichi, Hirata","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"994511","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Hiromi, Shibata","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"994512","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Yoshimi, Hirano","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"994513","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Keisuke, Yamada","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"994514","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Atsuya, Chiba","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"994515","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Yuichi, Saito","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"994516","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Kazumasa, Narumi","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"994517","nameIdentifierScheme":"WEKO"}]}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"高速 C60クラスターイオンビームを照射した Si 表面構造のエネルギー依存性","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"高速 C60クラスターイオンビームを照射した Si 表面構造のエネルギー依存性"}]},"item_type_id":"10004","owner":"1","path":["7"],"pubdate":{"attribute_name":"公開日","attribute_value":"2021-06-04"},"publish_date":"2021-06-04","publish_status":"0","recid":"82952","relation_version_is_last":true,"title":["高速 C60クラスターイオンビームを照射した Si 表面構造のエネルギー依存性"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-05-15T20:05:39.122226+00:00"}