@article{oai:repo.qst.go.jp:00082952,
 author = {新田, 紀子 and 大石脩人 and 土田, 秀次 and 冨田, 成夫 and 笹, 公和 and 平田, 浩一 and 柴田, 裕実 and 平野, 貴美 and 山田, 圭介 and 千葉, 敦也 and 斎藤, 勇一 and 鳴海, 一雅 and 星野, 靖 and Noriko, Nitta and Hidetsugu, Tsuchida and Shigeo, Tomita and Sasa, Kimikazu and Koichi, Hirata and Hiromi, Shibata and Yoshimi, Hirano and Keisuke, Yamada and Atsuya, Chiba and Yuichi, Saito and Kazumasa, Narumi},
 journal = {連携重点研究2020(令和2)年度成果報告書},
 month = {Jun},
 note = {Ion beam irradiation of Si induces the formation of fine structures on the surface by sputtering. In this study, the energy 
dependence of the formed structures was investigated by electron microscopy using fast C60 cluster ion beams. The size 
of the structures increases with increasing energy.},
 title = {高速 C60クラスターイオンビームを照射した Si 表面構造のエネルギー依存性},
 year = {2021}
}