{"created":"2023-05-15T15:00:24.183491+00:00","id":81974,"links":{},"metadata":{"_buckets":{"deposit":"46cb6666-5f1e-476c-a356-e0a3bcb3f2a4"},"_deposit":{"created_by":1,"id":"81974","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"81974"},"status":"published"},"_oai":{"id":"oai:repo.qst.go.jp:00081974","sets":["11"]},"author_link":["929689","929687","929688","929690"],"item_10004_biblio_info_7":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2021-01","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"1","bibliographicPageEnd":"26","bibliographicPageStart":"20","bibliographicVolumeNumber":"28","bibliographic_titles":[{"bibliographic_title":"レーザ加工学会誌"}]}]},"item_10004_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"我々は軟Ｘ線レーザによる材料表面の加工学理の解明と、材料表面の直接加工への展開を目的とした研究を行っている。フェムト秒軟Ｘ線自由電子レーザーによるシリコンおよび石英の表面加工実験から、軟Ｘ線レーザの発振波長を材料に合わせて最適化させ、なおかつ集光径を十分に小さくできれば、熱的影響を受けた意図しない構造の無い無欠陥加工が実現できること、そして、軟Ｘ線レーザをナノメートルサイズに集光できれば、集光径と同等のナノメートルスケールのパターンの加工が可能となることの知見を得た。ここで得た成果は、超短パルス・短波長光源である軟Ｘ線レーザや高次高調波による表面微細加工の大きな可能性を示すものである。","subitem_description_type":"Abstract"}]},"item_10004_publisher_8":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"レーザ加工学会"}]},"item_10004_source_id_9":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"1881-6797","subitem_source_identifier_type":"ISSN"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"metadata only access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_14cb"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"石野, 雅彦"}],"nameIdentifiers":[{"nameIdentifier":"929687","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"錦野, 将元"}],"nameIdentifiers":[{"nameIdentifier":"929688","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Masahiko, Ishino","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"929689","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Masaharu, Nishikino","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"929690","nameIdentifierScheme":"WEKO"}]}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"軟Ｘ線領域の超短パルスレーザ特有の表面微細加工","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"軟Ｘ線領域の超短パルスレーザ特有の表面微細加工"}]},"item_type_id":"10004","owner":"1","path":["11"],"pubdate":{"attribute_name":"公開日","attribute_value":"2020-09-17"},"publish_date":"2020-09-17","publish_status":"0","recid":"81974","relation_version_is_last":true,"title":["軟Ｘ線領域の超短パルスレーザ特有の表面微細加工"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-05-15T20:40:35.280620+00:00"}