{"created":"2023-05-15T14:59:46.195196+00:00","id":81103,"links":{},"metadata":{"_buckets":{"deposit":"81f25b1e-897c-41c5-8fc9-1a5a4d799764"},"_deposit":{"created_by":1,"id":"81103","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"81103"},"status":"published"},"_oai":{"id":"oai:repo.qst.go.jp:00081103","sets":["10:29"]},"author_link":["923803","923804","923810","923808","923802","923805","923807","923801","923799","923806","923800","923809"],"item_10005_date_7":{"attribute_name":"発表年月日","attribute_value_mlt":[{"subitem_date_issued_datetime":"2020-11-09","subitem_date_issued_type":"Issued"}]},"item_10005_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"Femtosecond-pulsed extreme ultraviolet (EUV) of free-electron laser (FEL) is the most potential candidates for a next-generation EUV lithography light source. However, the physical events and chemical reactions in resist materials, induced by EUV with a short pulse width and high power intensity, have not yet been elucidated. In our previous study, the morphological and chemical changes in poly(methyl methacrylate) (PMMA) induced by picosecond-pulsed EUV were investigated using an X-ray laser. The sensitivity of PMMA upon exposure to a 7 ps EUV pulse was much enhanced in comparison with that using conventional EUV sources, which have a typical pulse width of the order of nanoseconds. In this study, the sensitivity of PMMA upon exposure to femtosecond-pulsed EUV was investigated by using FEL to obtain the resist design for next-generation EUV lithography.","subitem_description_type":"Abstract"}]},"item_10005_description_6":{"attribute_name":"会議概要（会議名, 開催地, 会期, 主催者等）","attribute_value_mlt":[{"subitem_description":"33rd International Microprocesses and Nanotechnology Conference (MNC 2020)","subitem_description_type":"Other"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"metadata only access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_14cb"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"Hosaka, Yuji"}],"nameIdentifiers":[{"nameIdentifier":"923799","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Yamamoto, Hiroki"}],"nameIdentifiers":[{"nameIdentifier":"923800","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Ishino, Masahiko"}],"nameIdentifiers":[{"nameIdentifier":"923801","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Dinh, Thanhhung"}],"nameIdentifiers":[{"nameIdentifier":"923802","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Nishikino, Masaharu"}],"nameIdentifiers":[{"nameIdentifier":"923803","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Maekawa, Yasunari"}],"nameIdentifiers":[{"nameIdentifier":"923804","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Yuji, Hosaka","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"923805","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Hiroki, Yamamoto","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"923806","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Masahiko, Ishino","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"923807","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Dinh, Thanhhung","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"923808","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Masaharu, Nishikino","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"923809","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Yasunari, Maekawa","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"923810","nameIdentifierScheme":"WEKO"}]}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"conference object","resourceuri":"http://purl.org/coar/resource_type/c_c94f"}]},"item_title":"STUDY ON IRRADIATION EFFECTS BY FEMTOSECOND-PULSED EXTREME ULTRAVIOLET IN MAIN-CHAIN SCISSION RESIST","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"STUDY ON IRRADIATION EFFECTS BY FEMTOSECOND-PULSED EXTREME ULTRAVIOLET IN MAIN-CHAIN SCISSION RESIST"}]},"item_type_id":"10005","owner":"1","path":["29"],"pubdate":{"attribute_name":"公開日","attribute_value":"2020-10-21"},"publish_date":"2020-10-21","publish_status":"0","recid":"81103","relation_version_is_last":true,"title":["STUDY ON IRRADIATION EFFECTS BY FEMTOSECOND-PULSED EXTREME ULTRAVIOLET IN MAIN-CHAIN SCISSION RESIST"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-05-15T20:48:47.026628+00:00"}