@misc{oai:repo.qst.go.jp:00081031, author = {Kanehisa, Kyotaro and Tatsuishi, Tetsuya and Sonoda, Takahiro and Kawakatsu, Kazuto and Hata, Yuki and Tanii, Takashi and Onoda, Shinobu and Stacey, Alastair and Moshkani, Mojtaba and Mildren, Rich and Isoya, Junichi and Kono, Shozo and Kawarada, Hiroshi and Onoda, Shinobu}, month = {Sep}, note = {We established the method to fabricate two-dimensional (2D) shallow NV ensemble. We realized nitrogen-terminated (111) diamond surface with nitrogen radical exposure and grew very thin (approximately 10 nm) diamond film on the surface by microwave plasma-enhanced chemical vapor deposition (MPCVD). We counted the number of NV ensembles aligned in [111] direction of the NV ensembles which we observed. The probability of NV ensemble being aligned in [111] was 42 %. On the other hand, we changed the surface condition of N-terminated (111) diamond by thermal annealing. Then, we grew 10 nm diamond film on the surface. As a result, the probability of NV ensemble being aligned in [111] rose to 60 %. Also, s-factor developed from 0.44 to 0.52., 2020 International Conference on Solid State Devices and Materials}, title = {Alignment and Coherence Time of 2D Shallow NV Ensemble Fabricated from (111) Diamond}, year = {2020} }