@article{oai:repo.qst.go.jp:00080584, author = {Nakamura, Akino and Mizuta, Tomoki and Shimotsuma, Yasuhiko and Sakakura, Masaki and Otobe, Tomohito and Shimizu, Masahiro and Miura, Kiyotaka and Tomohito, Otobe}, issue = {12}, journal = {Chinese Optics Letters}, month = {Sep}, note = {Suppression of stress and crack generation during picosecond laser processing in transparent brittle material such as glass was successfully demonstrated by the picosecond laser pulse with temporal energy modulation. The origin of deterioration in processing accuracy could be interpreted in terms of the discontinuous movement of plasma in the vicinity of focus. To reveal the effectiveness of the temporal energy modulation for smooth machining, such plasma motion was simulated by FDTD. Furthermore, the photoinduced birefringence has been also observed by using high speed polarization camera.}, title = {Picosecond burst pulse machining with temporal energy modulation[invebted]}, volume = {18}, year = {2020} }