{"created":"2023-05-15T14:59:20.348468+00:00","id":80506,"links":{},"metadata":{"_buckets":{"deposit":"b55858ae-28b6-4cc6-af54-c56f2cbfe68a"},"_deposit":{"created_by":1,"id":"80506","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"80506"},"status":"published"},"_oai":{"id":"oai:repo.qst.go.jp:00080506","sets":["10:29"]},"author_link":["887769","887771","887772","887774","887768","887770","887767","887776","887777","887775","887778","887773"],"item_10005_date_7":{"attribute_name":"発表年月日","attribute_value_mlt":[{"subitem_date_issued_datetime":"2020-09-09","subitem_date_issued_type":"Issued"}]},"item_10005_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"　本研究では、C_60イオンビームを応用する上で重要なスパッタリングに着目し、スパッタリング収量の系統的な測定を目的とする。これまでに0.03～9 MeVのC_60イオン衝撃による金標的のスパッタリング収量を測定し、同じ速度のCイオン衝撃によるスパッタリング収量の測定と比較を行ってきた。今回は同じ速度のC_70イオン衝撃によるスパッタリング収量を測定し、比較・検討を行った。スパッタリング収量の測定には水晶振動子微量天秤法を用い、電極として水晶振動子に蒸着されている金薄膜を標的として用いた。量研高崎TIARAのタンデム加速器で加速した1.26～7.0 MeVのC_70^+、C_70^2+ビームを利用した。講演では、C_70イオンによるスパッタリング収量をこれまでに測定したC_60イオン、Cイオンの結果と比較し、結果について議論する予定である。","subitem_description_type":"Abstract"}]},"item_10005_description_6":{"attribute_name":"会議概要（会議名, 開催地, 会期, 主催者等）","attribute_value_mlt":[{"subitem_description":"日本物理学会2020年秋季大会","subitem_description_type":"Other"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"metadata only access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_14cb"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"鳴海, 一雅"}],"nameIdentifiers":[{"nameIdentifier":"887767","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"山田, 圭介"}],"nameIdentifiers":[{"nameIdentifier":"887768","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"千葉, 敦也"}],"nameIdentifiers":[{"nameIdentifier":"887769","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"平野, 貴美"}],"nameIdentifiers":[{"nameIdentifier":"887770","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"百合, 庸介"}],"nameIdentifiers":[{"nameIdentifier":"887771","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"齋藤, 勇一"}],"nameIdentifiers":[{"nameIdentifier":"887772","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Narumi, Kazumasa","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"887773","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Yamada, Keisuke","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"887774","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Chiba, Atsuya","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"887775","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Hirano, Yoshimi","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"887776","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Yuri, Yosuke","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"887777","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Saito, Yuuichi","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"887778","nameIdentifierScheme":"WEKO"}]}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"conference object","resourceuri":"http://purl.org/coar/resource_type/c_c94f"}]},"item_title":"C60イオン衝撃による金のスパッタリング収量の測定III","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"C60イオン衝撃による金のスパッタリング収量の測定III"}]},"item_type_id":"10005","owner":"1","path":["29"],"pubdate":{"attribute_name":"公開日","attribute_value":"2020-07-20"},"publish_date":"2020-07-20","publish_status":"0","recid":"80506","relation_version_is_last":true,"title":["C60イオン衝撃による金のスパッタリング収量の測定III"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-05-15T21:32:33.938734+00:00"}