{"created":"2023-05-15T14:58:26.615282+00:00","id":79289,"links":{},"metadata":{"_buckets":{"deposit":"a0033f87-719a-487a-abdb-8aa1de03c6eb"},"_deposit":{"created_by":1,"id":"79289","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"79289"},"status":"published"},"_oai":{"id":"oai:repo.qst.go.jp:00079289","sets":["10:28"]},"author_link":["849579","849577","849578","849576"],"item_10005_date_7":{"attribute_name":"発表年月日","attribute_value_mlt":[{"subitem_date_issued_datetime":"2020-03-14","subitem_date_issued_type":"Issued"}]},"item_10005_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"我々は以前テンプ レート層の材料として MgO を用いて Si 基板上に Fe3O4の薄膜を作製したが、MgO 膜の作製温度が常温付近に限定され、高い結晶性の膜を得るに至っていない。この問題点を克服するため、高温でも安定であり、Si との反応性が低い物質をテンプレート層に採用することを検討した。その候補として、我々はAl2O3に着目し、テンプレート層としての適性を実験結果とともに検討、考察する。 ","subitem_description_type":"Abstract"}]},"item_10005_description_6":{"attribute_name":"会議概要（会議名, 開催地, 会期, 主催者等）","attribute_value_mlt":[{"subitem_description":"第67回応用物理学会春季学術講演会","subitem_description_type":"Other"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"metadata only access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_14cb"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"山中, 健太"}],"nameIdentifiers":[{"nameIdentifier":"849576","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"山口, 憲司"}],"nameIdentifiers":[{"nameIdentifier":"849577","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Yamanaka, Kenta","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"849578","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Yamaguchi, Kenji","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"849579","nameIdentifierScheme":"WEKO"}]}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"conference object","resourceuri":"http://purl.org/coar/resource_type/c_c94f"}]},"item_title":"テンプレート層を用いたSi基板上への鉄酸化物膜の作製","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"テンプレート層を用いたSi基板上への鉄酸化物膜の作製"}]},"item_type_id":"10005","owner":"1","path":["28"],"pubdate":{"attribute_name":"公開日","attribute_value":"2020-01-27"},"publish_date":"2020-01-27","publish_status":"0","recid":"79289","relation_version_is_last":true,"title":["テンプレート層を用いたSi基板上への鉄酸化物膜の作製"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-05-15T22:31:17.405842+00:00"}