{"created":"2023-05-15T14:57:51.930384+00:00","id":78491,"links":{},"metadata":{"_buckets":{"deposit":"b2fb80ce-6c2b-4a6c-afeb-bbe9563cac34"},"_deposit":{"created_by":1,"id":"78491","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"78491"},"status":"published"},"_oai":{"id":"oai:repo.qst.go.jp:00078491","sets":["10:29"]},"author_link":["853524","853521","853522","853527","853526","853525","853523"],"item_10005_date_7":{"attribute_name":"発表年月日","attribute_value_mlt":[{"subitem_date_issued_datetime":"2020-03-12","subitem_date_issued_type":"Issued"}]},"item_10005_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"磁性、触媒、光・電子材料等で重要な機能を持つ遷移元素や半金属元素のK、L、M発光及び吸収スペクトルの多くは、数keVの軟X線領域に存在する。そのため、上記元素、化合物等の詳細な機能の解明には、その領域で使用する分光素子、検出器、及び分光器の更なる性能向上が必要とされている。本研究では、現在実用となっている最先端の回折格子と多層膜の製作技術を用いる場合に実現可能な仕様を持つ軟X線回折格子及び分光器を設計し、更に、その性能を計算で予測することとした。今回は、2~4 keVの軟X線領域を対象として、溝本数:3,200 本/mm、溝深さ:2 nm、デュティ比:0.45 のラミナー型回折格子上に硬X線域で広く用いられている所謂スーパーミラー構造を基本としたW/C多層膜(総膜層数:20)を積層した回折格子を設計した。発表では上述のW/C多層膜回折格子及びAu表面の回折格子の回折効率のエネルギー依存性を入射角(α)が88.65°及び、偏角(2K = α ‒β)が87.85°×2の使用条件におけるシミュレーションによる評価について述べる。","subitem_description_type":"Abstract"}]},"item_10005_description_6":{"attribute_name":"会議概要(会議名, 開催地, 会期, 主催者等)","attribute_value_mlt":[{"subitem_description":"第67回応用物理学会春季学術講演会","subitem_description_type":"Other"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"metadata only access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_14cb"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"小池, 雅人"}],"nameIdentifiers":[{"nameIdentifier":"853521","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"上野, 良弘"}],"nameIdentifiers":[{"nameIdentifier":"853522","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"羽多野, 忠"}],"nameIdentifiers":[{"nameIdentifier":"853523","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"ピロジコフ, アレキサンダー"}],"nameIdentifiers":[{"nameIdentifier":"853524","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"寺内, 正己"}],"nameIdentifiers":[{"nameIdentifier":"853525","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Koike, Masato","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"853526","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Pirozhkov, Alexander","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"853527","nameIdentifierScheme":"WEKO"}]}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"conference object","resourceuri":"http://purl.org/coar/resource_type/c_c94f"}]},"item_title":"2~4 keV領域高回折効率高分解能 軟X線ラミナー型多層膜回折格子の設計","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"2~4 keV領域高回折効率高分解能 軟X線ラミナー型多層膜回折格子の設計"}]},"item_type_id":"10005","owner":"1","path":["29"],"pubdate":{"attribute_name":"公開日","attribute_value":"2020-01-22"},"publish_date":"2020-01-22","publish_status":"0","recid":"78491","relation_version_is_last":true,"title":["2~4 keV領域高回折効率高分解能 軟X線ラミナー型多層膜回折格子の設計"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-05-15T22:22:16.733653+00:00"}