@misc{oai:repo.qst.go.jp:00078279, author = {Tatsuishi, T. and Sonoda, T. and Kanehisa, K. and Kawakatsu, K. and Hata, Y. and Nagaoka, K. and Ishii, Y. and Tanii, T. and Onoda, Shinobu and Stacey, A. and Isoya, J. and Kono, S. and Kawarada, H. and Onoda, Shinobu}, month = {Dec}, note = {Nitrogen vacancy (NV) center in diamond is expected as a magnetic sensor with high sensitivity at room temperature and detection of 1H spins out of the substrate by single NV center was reported [1]. For improvement of magnetic sensitivity, aligned shallow NV ensemble is required since the magnetic sensitivity is inversely proportional to a square root of number of NV centers contributing to the measurement [2, 3]. Delta-doping of nitrogen (N) was performed by diamond growth on N-terminated (001) diamond and estimated 2D concentration of NV centers was 1 x 1011 cm-2 [4]. This method can control the depth of NV ensemble precisely unlike ion implantation which are popular methods to fabricate NV ensemble. However, NV centers in the (001) delta-doping layer would be not aligned because possibility of each four sites adjacent to N becoming a vacancy are equivalent. In the case of (111) delta-doping layer, NV centers will be aligned because a top site is more preferable to become a vacancy than other three equivalent sites. Recently, we established the method to fabricate N-terminated diamond with high coverage without any damage on the surface [5]. We succeeded to fabricate aligned two-dimensional NV ensemble from N-terminated (111) diamond with half mono layer coverage embedded by high purity (111) diamond film., The 2nd International Forum on Quantum Metrology and Sensing (IFQMS)}, title = {Transformation of Nitrogen Adsorbed on (111) Diamond Surface into Highly Aligned 2-Dimensional NV Ensemble}, year = {2019} }