{"created":"2023-05-15T14:56:36.783755+00:00","id":76828,"links":{},"metadata":{"_buckets":{"deposit":"cf51dfb9-bc19-497e-93e4-3a916d059b8c"},"_deposit":{"created_by":1,"id":"76828","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"76828"},"status":"published"},"_oai":{"id":"oai:repo.qst.go.jp:00076828","sets":["10:29"]},"author_link":["784745","784740","784738","784737","784744","784739","784736","784741","784743","784742"],"item_10005_date_7":{"attribute_name":"発表年月日","attribute_value_mlt":[{"subitem_date_issued_datetime":"2019-09-10","subitem_date_issued_type":"Issued"}]},"item_10005_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"　本研究では、C60イオンビームの物質・材料科学、高感度分析技術等への応用を視野に入れ、応用面で重要なスパッタリングに着目し、スパッタリング収量を系統的に測定することを目的とする。今回は30 keV～9 MeVのエネルギー範囲で金標的のスパッタリング収量を測定した。測定には水晶振動子微量天秤法を用い、水晶振動子の電極用に蒸着されている金薄膜をそのまま金標的とした。30 keV～1080 keVのC60イオンビームはTIARAのイオン注入装置から、1.08 MeV～9 MeVのC60イオンビームは同タンデム加速器からのビームを利用した。講演では結果を報告するとともに、SRIMコードによるシミュレーションから求めた同じ速度のCイオン衝撃によるスパッタリング収量との比較を行い、さらに以前測定したSi標的のスパッタリング収量とも比較し、議論した。","subitem_description_type":"Abstract"}]},"item_10005_description_6":{"attribute_name":"会議概要（会議名, 開催地, 会期, 主催者等）","attribute_value_mlt":[{"subitem_description":"日本物理学会2019年秋季大会","subitem_description_type":"Other"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"metadata only access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_14cb"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"鳴海, 一雅"}],"nameIdentifiers":[{"nameIdentifier":"784736","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"山田, 圭介"}],"nameIdentifiers":[{"nameIdentifier":"784737","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"千葉, 敦也"}],"nameIdentifiers":[{"nameIdentifier":"784738","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"平野, 貴美"}],"nameIdentifiers":[{"nameIdentifier":"784739","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"齋藤, 勇一"}],"nameIdentifiers":[{"nameIdentifier":"784740","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Narumi, Kazumasa","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"784741","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Yamada, Keisuke","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"784742","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Chiba, Atsuya","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"784743","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Hirano, Yoshimi","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"784744","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Saito, Yuuichi","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"784745","nameIdentifierScheme":"WEKO"}]}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"conference object","resourceuri":"http://purl.org/coar/resource_type/c_c94f"}]},"item_title":"C60イオン衝撃による金のスパッタリング収量の測定","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"C60イオン衝撃による金のスパッタリング収量の測定"}]},"item_type_id":"10005","owner":"1","path":["29"],"pubdate":{"attribute_name":"公開日","attribute_value":"2019-09-18"},"publish_date":"2019-09-18","publish_status":"0","recid":"76828","relation_version_is_last":true,"title":["C60イオン衝撃による金のスパッタリング収量の測定"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-05-16T00:11:15.907379+00:00"}