{"created":"2023-05-15T14:55:38.102075+00:00","id":75529,"links":{},"metadata":{"_buckets":{"deposit":"98a461bf-d735-4c10-b6e9-59953885e3d7"},"_deposit":{"created_by":1,"id":"75529","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"75529"},"status":"published"},"_oai":{"id":"oai:repo.qst.go.jp:00075529","sets":["10:29"]},"author_link":["741505","741507","741504","741506","741510","741509","741511","741512","741508"],"item_10005_date_7":{"attribute_name":"発表年月日","attribute_value_mlt":[{"subitem_date_issued_datetime":"2019-06-17","subitem_date_issued_type":"Issued"}]},"item_10005_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"電子顕微鏡の試料上の電子線照射点を光源とする軟X 線回折格子分光器による発光ペクトル計測は軽元素を含む材料の局所領域分析に有効である。最近、最近自動車用鋼板の軽量化等を目的として、鉄鋼のFe-L発光(705 eV、1.76 nm)付近での状態分析に関心が高まっている。このため、回折格子面上に多層膜を付加してこの付近での回折効率の向上を図る方法について数値計算で考察したので報告する。仮定した回折格子はラミナー型で、刻線密度：2400 本/mm、溝深さ：6.2 nm、デューティ比：0.40、表面物質：Auである。この回折格子面上に膜厚7.4 nmのC層と同6.0 nmのW層を順に2対積層した回折格子について入射角が86.20°での回折効率を計算した。この場合1次光の705 eV付近での回折効率が0.10を上回り、およそ200 eV～900 eVの広いエネルギー領域で0.03以上の実用的な回折効率を示す結果を得た。","subitem_description_type":"Abstract"}]},"item_10005_description_6":{"attribute_name":"会議概要（会議名, 開催地, 会期, 主催者等）","attribute_value_mlt":[{"subitem_description":"公益社団法⼈ ⽇本顕微鏡学会 第75回学術講演会","subitem_description_type":"Other"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"metadata only access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_14cb"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"小池, 雅人"}],"nameIdentifiers":[{"nameIdentifier":"741504","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"羽多野, 忠"}],"nameIdentifiers":[{"nameIdentifier":"741505","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"ピロジコフ, アレキサンダー"}],"nameIdentifiers":[{"nameIdentifier":"741506","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"寺内, 正己"}],"nameIdentifiers":[{"nameIdentifier":"741507","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"林, 信和"}],"nameIdentifiers":[{"nameIdentifier":"741508","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"笹井, 浩行"}],"nameIdentifiers":[{"nameIdentifier":"741509","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"長野, 哲也"}],"nameIdentifiers":[{"nameIdentifier":"741510","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Koike, Masato","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"741511","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Pirozhkov, Alexander","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"741512","nameIdentifierScheme":"WEKO"}]}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"conference object","resourceuri":"http://purl.org/coar/resource_type/c_c94f"}]},"item_title":"Fe-K（705 eV）対応高回折効率・広帯域軟X線ラミナー型多層膜回折格子の設計","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Fe-K（705 eV）対応高回折効率・広帯域軟X線ラミナー型多層膜回折格子の設計"}]},"item_type_id":"10005","owner":"1","path":["29"],"pubdate":{"attribute_name":"公開日","attribute_value":"2019-04-02"},"publish_date":"2019-04-02","publish_status":"0","recid":"75529","relation_version_is_last":true,"title":["Fe-K（705 eV）対応高回折効率・広帯域軟X線ラミナー型多層膜回折格子の設計"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-05-16T07:28:28.483914+00:00"}