{"created":"2023-05-15T14:53:54.974698+00:00","id":73414,"links":{},"metadata":{"_buckets":{"deposit":"c2c5e245-36a8-4988-b1fa-5619c063dc7e"},"_deposit":{"created_by":1,"id":"73414","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"73414"},"status":"published"},"_oai":{"id":"oai:repo.qst.go.jp:00073414","sets":["1"]},"author_link":["744863","744866","744861","744864","744862","744865"],"item_8_biblio_info_7":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2019-01","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"060050-5","bibliographicPageStart":"060050-1","bibliographicVolumeNumber":"2054","bibliographic_titles":[{"bibliographic_title":"The American Institute of Physics (AIP) Conference Proceedings"}]}]},"item_8_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"波長13.9 nmのＸ線レーザー（XRL）で使用する回折格子ビーム強度モニタの高効率化のために、モリブデン薄膜を金コート回折格子に積層した。放射光を用いた回折効率測定によってMoコーティングによる高効率化を確認した。また、XRLで測定した0次と１次の回折光強度間に強い相関を認めた。ビーム強度モニタの実用性はMo回折格子から供給されたXRLビームを用いた軟Ｘ線エリプソメトリによって実証された。","subitem_description_type":"Abstract"}]},"item_8_publisher_8":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"AIP Publishing"}]},"item_8_relation_14":{"attribute_name":"DOI","attribute_value_mlt":[{"subitem_relation_type_id":{"subitem_relation_type_id_text":"10.1063/1.5084681","subitem_relation_type_select":"DOI"}}]},"item_8_relation_17":{"attribute_name":"関連サイト","attribute_value_mlt":[{"subitem_relation_type_id":{"subitem_relation_type_id_text":"https://aip.scitation.org/doi/abs/10.1063/1.5084681","subitem_relation_type_select":"URI"}}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"metadata only access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_14cb"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"今園, 孝志"}],"nameIdentifiers":[{"nameIdentifier":"744861","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"西原弘晃"}],"nameIdentifiers":[{"nameIdentifier":"744862","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"浮田龍一"}],"nameIdentifiers":[{"nameIdentifier":"744863","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"笹井浩行"}],"nameIdentifiers":[{"nameIdentifier":"744864","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"長野哲也"}],"nameIdentifiers":[{"nameIdentifier":"744865","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Imazono, Takashi","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"744866","nameIdentifierScheme":"WEKO"}]}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"Mo-overcoated grating-based beam intensity monitor for 13.9 nm X-ray laser","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Mo-overcoated grating-based beam intensity monitor for 13.9 nm X-ray laser"}]},"item_type_id":"8","owner":"1","path":["1"],"pubdate":{"attribute_name":"公開日","attribute_value":"2019-02-14"},"publish_date":"2019-02-14","publish_status":"0","recid":"73414","relation_version_is_last":true,"title":["Mo-overcoated grating-based beam intensity monitor for 13.9 nm X-ray laser"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-05-16T01:20:13.664692+00:00"}