@article{oai:repo.qst.go.jp:00073411, author = {Haruyama, Moriyoshi and Suda, Yoshinori and Kada, Wataru and Onoda, Shinobu and Ohshima, Takeshi and Miura, Kenta and Hanaizumi, Osamu and Haruyama, Moriyoshi and Kada, Wataru and Onoda, Shinobu and Ohshima, Takeshi}, journal = {Key Engineering Materials}, month = {Nov}, note = {Micrometer-scale patterning was performed using the particle beam writing technique with a focused heavy-ion microbeam, allowing the creation of a unique two-dimensional distribution of fluorescent centers in single-crystalline diamond. The focused nitrogen microbeam was scanned over the target of single-crystalline diamond prepared by chemical vapor deposition to create nitrogen-vacancy (NV) centers at defined positions. Imaging using a custom-built confocal fluorescence microscopy system revealed that the desired NV distribution was generated in the target crystal with a spatial resolution similar to the beam resolution. A two-dimensional matrix barcode test pattern was successfully generated in a diamond substrate to demonstrate the encryption of information inside a solid-state target.}, pages = {48--54}, title = {Fabrication of Two-Dimensional Arrays of Fluorescent Centers in Single-Crystalline Diamond Using Particle Beam Writing}, volume = {790}, year = {2018} }