{"created":"2023-05-15T14:53:45.797906+00:00","id":73213,"links":{},"metadata":{"_buckets":{"deposit":"94a70204-6765-4a79-9a93-65a17350b54f"},"_deposit":{"created_by":1,"id":"73213","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"73213"},"status":"published"},"_oai":{"id":"oai:repo.qst.go.jp:00073213","sets":["10:28"]},"author_link":["721594","721589","721597","721592","721595","721590","721596","721593","721591"],"item_10005_date_7":{"attribute_name":"発表年月日","attribute_value_mlt":[{"subitem_date_issued_datetime":"2019-03-12","subitem_date_issued_type":"Issued"}]},"item_10005_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"表面物質がNiの軟X線ラミナー型回折格子(刻線密度:1200本/mm、溝深さ:14 nm、ディユーテー比: 0.4)上にTiO2又はCeO2膜を堆積しB-K 発光(183eV)において1次光の回折効率が極大となる膜厚と入射角を数値計算により探索し、それぞれ最適膜厚が25.8 nmと31.5 nm及び最適入射角が84.360°と82.840°の値を得た。この結果に基づき回折格子に上記の酸化物膜を付加した。TiO2とCeO2の膜厚の実測値はそれぞれ22.0 nmと30.2 nmであった。放射光(PF-11D)を用いてそれぞれの回折格子の回折効率の入射角依存性を測定した結果、183 eVにおいて従来のNi回折格子を入射角87.07°で用いる場合に対して、回折効率と受光立体角の増加により最大で分光された光量が2.4倍(TiO2、入射角:85.262°)、3.8倍(CeO2、入射角:84.492°)に増加する結果を得た。","subitem_description_type":"Abstract"}]},"item_10005_description_6":{"attribute_name":"会議概要(会議名, 開催地, 会期, 主催者等)","attribute_value_mlt":[{"subitem_description":"2018年度量子ビームサイエンスフェスタ","subitem_description_type":"Other"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"metadata only access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_14cb"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"小池, 雅人"}],"nameIdentifiers":[{"nameIdentifier":"721589","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"羽多野, 忠"}],"nameIdentifiers":[{"nameIdentifier":"721590","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"ピロジコフ, アレキサンダー"}],"nameIdentifiers":[{"nameIdentifier":"721591","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"寺内, 正己"}],"nameIdentifiers":[{"nameIdentifier":"721592","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"浮田, 龍一"}],"nameIdentifiers":[{"nameIdentifier":"721593","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"西原, 弘晃"}],"nameIdentifiers":[{"nameIdentifier":"721594","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"笹井, 浩行"}],"nameIdentifiers":[{"nameIdentifier":"721595","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"小池 雅人","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"721596","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"ピロジコフ アレキサンダー","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"721597","nameIdentifierScheme":"WEKO"}]}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"conference object","resourceuri":"http://purl.org/coar/resource_type/c_c94f"}]},"item_title":"酸化物膜付加ボロンK発光(183 eV)対応 軟X線ラミナー型回折格子の回折効率評価","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"酸化物膜付加ボロンK発光(183 eV)対応 軟X線ラミナー型回折格子の回折効率評価"}]},"item_type_id":"10005","owner":"1","path":["28"],"pubdate":{"attribute_name":"公開日","attribute_value":"2019-02-19"},"publish_date":"2019-02-19","publish_status":"0","recid":"73213","relation_version_is_last":true,"title":["酸化物膜付加ボロンK発光(183 eV)対応 軟X線ラミナー型回折格子の回折効率評価"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-05-15T19:31:47.257049+00:00"}