{"created":"2023-05-15T14:53:32.749817+00:00","id":72918,"links":{},"metadata":{"_buckets":{"deposit":"41d4c5ff-d232-41d3-8b20-70f381a98d32"},"_deposit":{"created_by":1,"id":"72918","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"72918"},"status":"published"},"_oai":{"id":"oai:repo.qst.go.jp:00072918","sets":["10:28"]},"author_link":["718524","718520","718529","718531","718521","718526","718523","718536","718537","718518","718535","718530","718522","718527","718519","718525","718532","718528","718534","718533"],"item_10005_date_7":{"attribute_name":"発表年月日","attribute_value_mlt":[{"subitem_date_issued_datetime":"2018-09-06","subitem_date_issued_type":"Issued"}]},"item_10005_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"In this paper we report on results of extreme ultraviolet (EUV) free-electron laser ablation experiments. In the ablation experiments, we had evaluated the throughput energy of SACLA BL1, and confirmed the dependence on damage thresholds of pulse duration. In addition, the damage examinations of resists and multilayer mirrors had been evaluated and material dependent of threshold was confirmed. ","subitem_description_type":"Abstract"}]},"item_10005_description_6":{"attribute_name":"会議概要（会議名, 開催地, 会期, 主催者等）","attribute_value_mlt":[{"subitem_description":"SACLA Users' Meeting 2018","subitem_description_type":"Other"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"metadata only access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_14cb"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"石野, 雅彦"}],"nameIdentifiers":[{"nameIdentifier":"718518","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"タンフン, ヂン"}],"nameIdentifiers":[{"nameIdentifier":"718519","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"北村, 俊幸"}],"nameIdentifiers":[{"nameIdentifier":"718520","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"長谷川, 登"}],"nameIdentifiers":[{"nameIdentifier":"718521","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"錦野, 将元"}],"nameIdentifiers":[{"nameIdentifier":"718522","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"坂上, 和之"}],"nameIdentifiers":[{"nameIdentifier":"718523","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"鷲尾, 方一"}],"nameIdentifiers":[{"nameIdentifier":"718524","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"東口, 武史"}],"nameIdentifiers":[{"nameIdentifier":"718525","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"市丸, 智"}],"nameIdentifiers":[{"nameIdentifier":"718526","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"岡本, 一将"}],"nameIdentifiers":[{"nameIdentifier":"718527","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"古澤, 孝弘"}],"nameIdentifiers":[{"nameIdentifier":"718528","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"末元, 徹"}],"nameIdentifiers":[{"nameIdentifier":"718529","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"木下, 博雄"}],"nameIdentifiers":[{"nameIdentifier":"718530","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Pikuz, Tatiana"}],"nameIdentifiers":[{"nameIdentifier":"718531","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Faenov, Anatoly"}],"nameIdentifiers":[{"nameIdentifier":"718532","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"石野 雅彦","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"718533","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"タンフン ヂン","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"718534","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"北村 俊幸","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"718535","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"長谷川 登","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"718536","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"錦野 将元","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"718537","nameIdentifierScheme":"WEKO"}]}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"conference object","resourceuri":"http://purl.org/coar/resource_type/c_c94f"}]},"item_title":"EUV Laser Ablation and Damage Examination","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"EUV Laser Ablation and Damage Examination"}]},"item_type_id":"10005","owner":"1","path":["28"],"pubdate":{"attribute_name":"公開日","attribute_value":"2018-09-10"},"publish_date":"2018-09-10","publish_status":"0","recid":"72918","relation_version_is_last":true,"title":["EUV Laser Ablation and Damage Examination"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-05-15T19:34:40.918407+00:00"}