{"created":"2023-05-15T14:53:32.402444+00:00","id":72910,"links":{},"metadata":{"_buckets":{"deposit":"8524964a-4225-4bbd-89ff-edf21087c7ad"},"_deposit":{"created_by":1,"id":"72910","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"72910"},"status":"published"},"_oai":{"id":"oai:repo.qst.go.jp:00072910","sets":["10:28"]},"author_link":["718413","718416","718425","718421","718412","718428","718427","718417","718415","718418","718422","718426","718414","718420","718429","718423","718419","718424"],"item_10005_date_7":{"attribute_name":"発表年月日","attribute_value_mlt":[{"subitem_date_issued_datetime":"2018-07-03","subitem_date_issued_type":"Issued"}]},"item_10005_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"　イオン照射によって半導体表面に誘起されるポーラス構造は、ナノ加工のボトムアップ的なアプローチとして注目されてきた。本研究では、特にサブMeV級のC60イオンをGaSbウェハーに照射して表面に形成されるファイバー状構造に注目し、その温度依存性と照射量依存性を調べることで形成メカニズムを議論する。まず、単原子イオン照射とC60イオン照射を比べると、同じ照射量ではC60イオン照射の場合のみポーラス構造が観測された。さらに、C60イオン照射の場合にはファイバー状構造が観測され、照射量の増大とともに顕著になった。これらの結果はC60イオン照射の場合、カスケードの重畳によってより効率的に欠陥が生成されることを示唆する。次に室温照射と液体窒素温度照射を比較し、後者においてはファイバー状構造が形成されづらいことを見出した。液体窒素温度では室温の場合よりも点欠陥の移動が阻害されるからだと考えられる。以上の結果から、ファイバー状構造は、照射誘起点欠陥の自己組織化によって形成されるものと考えられる。","subitem_description_type":"Abstract"}]},"item_10005_description_6":{"attribute_name":"会議概要（会議名, 開催地, 会期, 主催者等）","attribute_value_mlt":[{"subitem_description":"10th International Symposium on Swift Heavy Ions in Matter & 28th International Conference on Atomic Collisions in Solids","subitem_description_type":"Other"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"metadata only access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_14cb"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"土田, 秀次 (京都大学)"}],"nameIdentifiers":[{"nameIdentifier":"718412","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"新田, 紀子 (高知工科大学)"}],"nameIdentifiers":[{"nameIdentifier":"718413","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"中本, 尚樹 (高知工科大学)"}],"nameIdentifiers":[{"nameIdentifier":"718414","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"冨田, 成夫 (筑波大学)"}],"nameIdentifiers":[{"nameIdentifier":"718415","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"笹, 公和 (筑波大学)"}],"nameIdentifiers":[{"nameIdentifier":"718416","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"平田, 浩一 (産総研)"}],"nameIdentifiers":[{"nameIdentifier":"718417","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"柴田, 裕実 (大阪大学)"}],"nameIdentifiers":[{"nameIdentifier":"718418","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"齋藤, 勇一"}],"nameIdentifiers":[{"nameIdentifier":"718419","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"鳴海, 一雅"}],"nameIdentifiers":[{"nameIdentifier":"718420","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"千葉, 敦也"}],"nameIdentifiers":[{"nameIdentifier":"718421","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"山田, 圭介"}],"nameIdentifiers":[{"nameIdentifier":"718422","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"平野, 貴美"}],"nameIdentifiers":[{"nameIdentifier":"718423","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"星野, 靖 (神奈川大学)"}],"nameIdentifiers":[{"nameIdentifier":"718424","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"齋藤 勇一","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"718425","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"鳴海 一雅","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"718426","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"千葉 敦也","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"718427","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"山田 圭介","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"718428","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"平野 貴美","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"718429","nameIdentifierScheme":"WEKO"}]}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"conference object","resourceuri":"http://purl.org/coar/resource_type/c_c94f"}]},"item_title":"Formation of nano-porous surface structures by fast C60 beam bombardments","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Formation of nano-porous surface structures by fast C60 beam bombardments"}]},"item_type_id":"10005","owner":"1","path":["28"],"pubdate":{"attribute_name":"公開日","attribute_value":"2018-08-30"},"publish_date":"2018-08-30","publish_status":"0","recid":"72910","relation_version_is_last":true,"title":["Formation of nano-porous surface structures by fast C60 beam bombardments"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-05-15T19:34:46.309065+00:00"}