{"created":"2023-05-15T14:53:15.312372+00:00","id":72547,"links":{},"metadata":{"_buckets":{"deposit":"f307bf17-5c7a-449a-bf78-a64901d1338c"},"_deposit":{"created_by":1,"id":"72547","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"72547"},"status":"published"},"_oai":{"id":"oai:repo.qst.go.jp:00072547","sets":["10:28"]},"author_link":["714478","714477"],"item_10005_date_7":{"attribute_name":"発表年月日","attribute_value_mlt":[{"subitem_date_issued_datetime":"2017-11-22","subitem_date_issued_type":"Issued"}]},"item_10005_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"レーザー励起EUV光源におけるデブリ粒子発生のメカニズムを解明するため、ラグランジ流体シミュレーションにメッシュの動的再配置のアルゴリズムを組み込むことにより、物質の分布に従ってメッシュを配置するとともに、相転移を経た気泡や粒子の発生を再現できる手法を開発した。","subitem_description_type":"Abstract"}]},"item_10005_description_6":{"attribute_name":"会議概要（会議名, 開催地, 会期, 主催者等）","attribute_value_mlt":[{"subitem_description":"プラズマ2017 参加とポスター発表","subitem_description_type":"Other"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"metadata only access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_14cb"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"佐々木, 明"}],"nameIdentifiers":[{"nameIdentifier":"714477","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"佐々木 明","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"714478","nameIdentifierScheme":"WEKO"}]}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"conference object","resourceuri":"http://purl.org/coar/resource_type/c_c94f"}]},"item_title":"レーザー励起極端紫外(EUV)光源ターゲットのアブレーションにおける 粒子放出の流体力学モデルの構築","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"レーザー励起極端紫外(EUV)光源ターゲットのアブレーションにおける 粒子放出の流体力学モデルの構築"}]},"item_type_id":"10005","owner":"1","path":["28"],"pubdate":{"attribute_name":"公開日","attribute_value":"2017-11-28"},"publish_date":"2017-11-28","publish_status":"0","recid":"72547","relation_version_is_last":true,"title":["レーザー励起極端紫外(EUV)光源ターゲットのアブレーションにおける 粒子放出の流体力学モデルの構築"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-05-15T19:38:36.383065+00:00"}