{"created":"2023-05-15T14:53:12.800507+00:00","id":72509,"links":{},"metadata":{"_buckets":{"deposit":"b1ba619d-5266-4a75-a585-26c0014798d2"},"_deposit":{"created_by":1,"id":"72509","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"72509"},"status":"published"},"_oai":{"id":"oai:repo.qst.go.jp:00072509","sets":["10:28"]},"author_link":["714086","714085"],"item_10005_date_7":{"attribute_name":"発表年月日","attribute_value_mlt":[{"subitem_date_issued_datetime":"2017-11-29","subitem_date_issued_type":"Issued"}]},"item_10005_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"デバイス機能の本質を理解するために、近年、テンダーX線（概ね1～5 keV領域）でのオペランド分光計測が進展してきた。回折格子は反射膜（Au）の吸収により著しく回折効率が低下するため、当該領域での利用は一般に困難とされる。反射膜を多層膜化することで高効率化できるが、一定入射角での分光範囲は狭くなる。もし、テンダーX線で広帯域多層膜回折格子を開発できれば、波長掃印することなくオペランド計測を実現できる。本研究では、非周期Ni/C多層膜を適用した多層膜回折格子を考案し、回折効率の広帯域化を実験的に確かめるとともに、テンダーX線領域の特性Ｘ線の線幅計測から分解能を評価したので報告する。","subitem_description_type":"Abstract"}]},"item_10005_description_6":{"attribute_name":"会議概要（会議名, 開催地, 会期, 主催者等）","attribute_value_mlt":[{"subitem_description":"第14回X線結像光学シンポジウム","subitem_description_type":"Other"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"metadata only access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_14cb"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"今園, 孝志"}],"nameIdentifiers":[{"nameIdentifier":"714085","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"今園 孝志","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"714086","nameIdentifierScheme":"WEKO"}]}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"conference object","resourceuri":"http://purl.org/coar/resource_type/c_c94f"}]},"item_title":"広帯域多層膜回折格子を搭載したテンダーX線分光器の結像特性","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"広帯域多層膜回折格子を搭載したテンダーX線分光器の結像特性"}]},"item_type_id":"10005","owner":"1","path":["28"],"pubdate":{"attribute_name":"公開日","attribute_value":"2017-11-06"},"publish_date":"2017-11-06","publish_status":"0","recid":"72509","relation_version_is_last":true,"title":["広帯域多層膜回折格子を搭載したテンダーX線分光器の結像特性"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-05-15T19:39:02.976181+00:00"}