{"created":"2023-05-15T14:52:51.039817+00:00","id":72158,"links":{},"metadata":{"_buckets":{"deposit":"b63f3789-7742-4da4-bb64-e5654b57a781"},"_deposit":{"created_by":1,"id":"72158","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"72158"},"status":"published"},"_oai":{"id":"oai:repo.qst.go.jp:00072158","sets":["10:28"]},"author_link":["710523","710525","710532","710534","710533","710531","710524","710526","710529","710527","710530","710522","710528","710521"],"item_10005_date_7":{"attribute_name":"発表年月日","attribute_value_mlt":[{"subitem_date_issued_datetime":"2017-01-27","subitem_date_issued_type":"Issued"}]},"item_10005_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"イオンマイクロビームを用いた微細加工技術（Proton Beam Wrinting : PBW）の利用拡大の一環として、柔軟性があり様々な場所に実装することが可能な光導波路の開発を行っている。今回、フレキシブルポジ感光基板(厚さ85μm)にPBW（ビーム径：1μm、エネルギー：1.7MeV）を使用して、光スイッチへの利用が期待されるマッハツェンダー（MZ）型導波路（導波路幅：8μm、長さ：40mm）を照射量を変えて描画した。これに波長1.5μmの赤外光を入力し、透過光を観察した結果、400～1000nC/mm2の注入量で正常な光の伝搬を示すシングルモードの出射光が得られることを確認した。これにより、柔軟性をもつ材料でMZ型の導波路の製作が可能なことを明らかにした。","subitem_description_type":"Abstract"}]},"item_10005_description_6":{"attribute_name":"会議概要（会議名, 開催地, 会期, 主催者等）","attribute_value_mlt":[{"subitem_description":"第1回QST高崎研シンポジウム","subitem_description_type":"Other"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"metadata only access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_14cb"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"加田, 渉"}],"nameIdentifiers":[{"nameIdentifier":"710521","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"三浦, 聡"}],"nameIdentifiers":[{"nameIdentifier":"710522","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"高橋, 良平"}],"nameIdentifiers":[{"nameIdentifier":"710523","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"阿久津, 尚紀"}],"nameIdentifiers":[{"nameIdentifier":"710524","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"川端, 駿介"}],"nameIdentifiers":[{"nameIdentifier":"710525","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"猿谷, 良太"}],"nameIdentifiers":[{"nameIdentifier":"710526","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"三浦, 健太"}],"nameIdentifiers":[{"nameIdentifier":"710527","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"花泉, 修"}],"nameIdentifiers":[{"nameIdentifier":"710528","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"佐藤, 隆博"}],"nameIdentifiers":[{"nameIdentifier":"710529","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"山田, 尚人"}],"nameIdentifiers":[{"nameIdentifier":"710530","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"石井, 保行"}],"nameIdentifiers":[{"nameIdentifier":"710531","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"石井, 保行"}],"nameIdentifiers":[{"nameIdentifier":"710532","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"佐藤 隆博","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"710533","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"石井 保行","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"710534","nameIdentifierScheme":"WEKO"}]}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"conference object","resourceuri":"http://purl.org/coar/resource_type/c_c94f"}]},"item_title":"Proton Beam Writing 技術を利用したフレキシブル電気回路基板内部への光配線実装の試み","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Proton Beam Writing 技術を利用したフレキシブル電気回路基板内部への光配線実装の試み"}]},"item_type_id":"10005","owner":"1","path":["28"],"pubdate":{"attribute_name":"公開日","attribute_value":"2017-02-14"},"publish_date":"2017-02-14","publish_status":"0","recid":"72158","relation_version_is_last":true,"title":["Proton Beam Writing 技術を利用したフレキシブル電気回路基板内部への光配線実装の試み"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-05-15T19:43:06.066335+00:00"}