{"created":"2023-05-15T14:52:47.733233+00:00","id":72082,"links":{},"metadata":{"_buckets":{"deposit":"7aa66ef9-ed69-44d4-b10c-4956ed929b18"},"_deposit":{"created_by":1,"id":"72082","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"72082"},"status":"published"},"_oai":{"id":"oai:repo.qst.go.jp:00072082","sets":["10:28"]},"author_link":["709866","709867"],"item_10005_date_7":{"attribute_name":"発表年月日","attribute_value_mlt":[{"subitem_date_issued_datetime":"2017-01-08","subitem_date_issued_type":"Issued"}]},"item_10005_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"本研究では、軟Ｘ線用シリコンフォトダイオード検出器（IRD社AXUV100G）のアクティブ領域にイオンビームスパッタ法でMo/Si多層膜鏡を積層した多層膜フォトダイオード検出器（MPD）のプロトタイプを試作した。放射光及びレーザー駆動プラズマＸ線レーザー光源（波長13.9 nm）を用いた反射率及び透過率測定の結果、MPDは高効率反射鏡として機能するとともに、その反射率と透過率の間には強い正の相関が認められた。MPDはショット毎に変動するＸ線レーザーのビーム強度モニタとして十分な性能を有し、Ｘ線レーザーによる軟Ｘ線加工技術に不可欠な1パルスあたりの光子数の高精度計測に有効であることが分かった。","subitem_description_type":"Abstract"}]},"item_10005_description_6":{"attribute_name":"会議概要（会議名, 開催地, 会期, 主催者等）","attribute_value_mlt":[{"subitem_description":"第30回日本放射光学会年会・放射光科学合同シンポジウム","subitem_description_type":"Other"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"metadata only access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_14cb"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"今園, 孝志"}],"nameIdentifiers":[{"nameIdentifier":"709866","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"今園 孝志","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"709867","nameIdentifierScheme":"WEKO"}]}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"conference object","resourceuri":"http://purl.org/coar/resource_type/c_c94f"}]},"item_title":"レーザー駆動プラズマＸ線レーザー強度モニタ用 Mo/Si多層膜コートフォトダイオード検出器の試作","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"レーザー駆動プラズマＸ線レーザー強度モニタ用 Mo/Si多層膜コートフォトダイオード検出器の試作"}]},"item_type_id":"10005","owner":"1","path":["28"],"pubdate":{"attribute_name":"公開日","attribute_value":"2016-12-05"},"publish_date":"2016-12-05","publish_status":"0","recid":"72082","relation_version_is_last":true,"title":["レーザー駆動プラズマＸ線レーザー強度モニタ用 Mo/Si多層膜コートフォトダイオード検出器の試作"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-05-15T19:44:01.351427+00:00"}