{"created":"2023-05-15T14:52:47.418154+00:00","id":72075,"links":{},"metadata":{"_buckets":{"deposit":"7593f089-0f91-4b5b-ae29-44df4727bb52"},"_deposit":{"created_by":1,"id":"72075","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"72075"},"status":"published"},"_oai":{"id":"oai:repo.qst.go.jp:00072075","sets":["10:28"]},"author_link":["709828","709825","709827","709826"],"item_10005_date_7":{"attribute_name":"発表年月日","attribute_value_mlt":[{"subitem_date_issued_datetime":"2016-11-24","subitem_date_issued_type":"Issued"}]},"item_10005_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"極端紫外線（EUV）リソグラフィ装置で用いる多層膜反射鏡の高強度EUV照射に対する耐性評価を目的とした照射損傷試験を行った。EUVレーザーを多層膜試料に照射し、損傷構造が確認できる最小のフルーエンスから照射に対する耐性を評価した。その結果、Nb/Si多層膜が従来のMo/Si多層膜に比べて高い照射耐性を有することを見出した。","subitem_description_type":"Abstract"}]},"item_10005_description_6":{"attribute_name":"会議概要（会議名, 開催地, 会期, 主催者等）","attribute_value_mlt":[{"subitem_description":"光・量子ビーム科学合同シンポジウム","subitem_description_type":"Other"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"metadata only access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_14cb"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"石野, 雅彦"}],"nameIdentifiers":[{"nameIdentifier":"709825","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"錦野, 将元"}],"nameIdentifiers":[{"nameIdentifier":"709826","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"石野 雅彦","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"709827","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"錦野 将元","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"709828","nameIdentifierScheme":"WEKO"}]}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"conference object","resourceuri":"http://purl.org/coar/resource_type/c_c94f"}]},"item_title":"EUVレーザーによる多層膜反射鏡の照射損傷評価","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"EUVレーザーによる多層膜反射鏡の照射損傷評価"}]},"item_type_id":"10005","owner":"1","path":["28"],"pubdate":{"attribute_name":"公開日","attribute_value":"2016-11-28"},"publish_date":"2016-11-28","publish_status":"0","recid":"72075","relation_version_is_last":true,"title":["EUVレーザーによる多層膜反射鏡の照射損傷評価"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-05-15T19:44:05.947176+00:00"}