@misc{oai:repo.qst.go.jp:00071807, author = {Muramatsu, Masayuki and Kitagawa, Atsushi and Hojo, Satoru and Iwata, Yoshiyuki and Katagiri, Ken and Sakamoto, Yukio and al., et and 村松 正幸 and 北川 敦志 and 北條 悟 and 岩田 佳之 and 片桐 健 and 坂本 幸雄}, month = {Aug}, note = {There is a desire that a carbon-ion radiotherapy facility will produce various ion species for fundamental research. Although the present Kei2-type ion sources are dedicated for the carbon-ion production, a future ion source is expected: 1) carbon-ion production for medical use, 2) various ions with a charge-to-mass ratio of 1/3 for the existed linac injector, and 3) low cost for modification. A prototype compact electron cyclotron resonance (ECR) ion source, named Kei3, based on Kei series has been developed to correspond to produce these various ions at National Institute of Radiological Sciences (NIRS). The Kei3 has an outer diameter of 280 mm and a length of 1120 mm. The magnetic field is formed by the same permanent magnet as Kei2. The movable extraction electrode has been installed in order to optimize the beam extraction with various current densities. The gas-injection side of vacuum chamber has enough space for an oven system. We measured dependence of microwave frequency, extraction voltage, and puller position. Charge state distributions of helium, carbon, nitrogen, oxygen, and neon were also measured., 16th International Conference on Ion Sources (ICIS2015)}, title = {Development of a compact ECR ion source for various ion production}, year = {2015} }