{"created":"2023-05-15T14:48:55.586478+00:00","id":67021,"links":{},"metadata":{"_buckets":{"deposit":"6518dfa6-b64e-4b6b-8ba1-93450acba48e"},"_deposit":{"created_by":1,"id":"67021","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"67021"},"status":"published"},"_oai":{"id":"oai:repo.qst.go.jp:00067021","sets":["10:29"]},"author_link":["658758","658757","658764","658761","658760","658765","658763","658762","658759"],"item_10005_date_7":{"attribute_name":"発表年月日","attribute_value_mlt":[{"subitem_date_issued_datetime":"2019-03-09","subitem_date_issued_type":"Issued"}]},"item_10005_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"電子顕微鏡の試料上の電子照射点を光源とする軟X 線回折格子分光器による発光ペクトル計測（SXES) は軽元素を含む材料の局所領域分析に有効である。最近、最近自動車用鋼板の軽量化等を目的として、ボロン等の微量元素を含む鉄鋼のFe-L発光(705 eV、1.76 nm))付近での状態分析に関心が高まっている。このため、SXESの更なる高感度化を目指して、回折格子面上に多層膜を付加して回折効率の向上を図る方法について考察したので報告する。仮定した回折格子はラミナー型で、中心刻線密度：2400 本/mm、溝深さ：6.5 nm、デューティ比：0.40、表面物質：Auである。　この回折格子面上に膜厚7 nmのC層と同6 nmのW層を順に2対付加した多層膜回折格子の回折効率を計算した。705 eVの軟X線の回折効率の入射角依存性を調べた所、入射角が86.20°の時、これまでの2倍以上の0.103の最大の回折効率が得られることが判った。また、その入射角における回折効率のエネルギー依存性を調べるとおよそ200 eV～900 eVの広いエネルギー領域で0.03以上の回折効率を示していることが判った。","subitem_description_type":"Abstract"}]},"item_10005_description_6":{"attribute_name":"会議概要（会議名, 開催地, 会期, 主催者等）","attribute_value_mlt":[{"subitem_description":"2019年第66回応用物理学会春季学術講演会","subitem_description_type":"Other"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"metadata only access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_14cb"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"小池, 雅人"}],"nameIdentifiers":[{"nameIdentifier":"658757","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"羽多野, 忠"}],"nameIdentifiers":[{"nameIdentifier":"658758","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"ピロジコフ, アレキサンダー"}],"nameIdentifiers":[{"nameIdentifier":"658759","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"寺内, 正己"}],"nameIdentifiers":[{"nameIdentifier":"658760","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"林, 信和"}],"nameIdentifiers":[{"nameIdentifier":"658761","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"笹井, 浩行"}],"nameIdentifiers":[{"nameIdentifier":"658762","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"長野, 哲也"}],"nameIdentifiers":[{"nameIdentifier":"658763","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"小池 雅人","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"658764","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"ピロジコフ アレキサンダー","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"658765","nameIdentifierScheme":"WEKO"}]}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"conference object","resourceuri":"http://purl.org/coar/resource_type/c_c94f"}]},"item_title":"200～900 eV域対応高回折効率・広受光角 軟X線ラミナー型Ｗ/Ｃ多層膜回折格子の設計","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"200～900 eV域対応高回折効率・広受光角 軟X線ラミナー型Ｗ/Ｃ多層膜回折格子の設計"}]},"item_type_id":"10005","owner":"1","path":["29"],"pubdate":{"attribute_name":"公開日","attribute_value":"2018-12-05"},"publish_date":"2018-12-05","publish_status":"0","recid":"67021","relation_version_is_last":true,"title":["200～900 eV域対応高回折効率・広受光角 軟X線ラミナー型Ｗ/Ｃ多層膜回折格子の設計"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-05-15T20:42:23.324147+00:00"}