{"created":"2023-05-15T14:48:48.636049+00:00","id":66861,"links":{},"metadata":{"_buckets":{"deposit":"6f8cee81-b104-4662-94c2-fb987bc7e4dd"},"_deposit":{"created_by":1,"id":"66861","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"66861"},"status":"published"},"_oai":{"id":"oai:repo.qst.go.jp:00066861","sets":["10:29"]},"author_link":["657383","657389","657385","657386","657382","657388","657378","657381","657384","657387","657391","657393","657380","657390","657379","657377","657392"],"item_10005_date_7":{"attribute_name":"発表年月日","attribute_value_mlt":[{"subitem_date_issued_datetime":"2018-07-11","subitem_date_issued_type":"Issued"}]},"item_10005_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"we created Vsi into in-plane SiC pn junction diode by using focused proton beam as small as 1 um of diameter. Characterizations suggested that PBW successfully introduced electrically excitable Vsi into the device without remarkable degradation of diode performance. ","subitem_description_type":"Abstract"}]},"item_10005_description_6":{"attribute_name":"会議概要(会議名, 開催地, 会期, 主催者等)","attribute_value_mlt":[{"subitem_description":"第16回核マイクロプローブの技術及び応用に関する国際会議(ICNMTA2018) への参加、及びSiC中のSPSに関する研究についての打合せ(山?雄一)","subitem_description_type":"Other"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"metadata only access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_14cb"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"山崎, 雄一"}],"nameIdentifiers":[{"nameIdentifier":"657377","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"千葉, 陽史"}],"nameIdentifiers":[{"nameIdentifier":"657378","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"牧野, 高紘"}],"nameIdentifiers":[{"nameIdentifier":"657379","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"佐藤, 真一郎"}],"nameIdentifiers":[{"nameIdentifier":"657380","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"山田, 尚人"}],"nameIdentifiers":[{"nameIdentifier":"657381","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"佐藤, 隆博"}],"nameIdentifiers":[{"nameIdentifier":"657382","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"土方, 泰斗"}],"nameIdentifiers":[{"nameIdentifier":"657383","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"児嶋, 一聡"}],"nameIdentifiers":[{"nameIdentifier":"657384","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Lee, Sang-Yun"}],"nameIdentifiers":[{"nameIdentifier":"657385","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"大島, 武"}],"nameIdentifiers":[{"nameIdentifier":"657386","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"山崎 雄一","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"657387","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"千葉 陽史","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"657388","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"牧野 高紘","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"657389","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"佐藤 真一郎","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"657390","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"山田 尚人","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"657391","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"佐藤 隆博","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"657392","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"大島 武","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"657393","nameIdentifierScheme":"WEKO"}]}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"conference object","resourceuri":"http://purl.org/coar/resource_type/c_c94f"}]},"item_title":"Position-selective introduction of electrically excitable color centers in SiC pn junction diode by proton beam writing","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Position-selective introduction of electrically excitable color centers in SiC pn junction diode by proton beam writing"}]},"item_type_id":"10005","owner":"1","path":["29"],"pubdate":{"attribute_name":"公開日","attribute_value":"2018-07-26"},"publish_date":"2018-07-26","publish_status":"0","recid":"66861","relation_version_is_last":true,"title":["Position-selective introduction of electrically excitable color centers in SiC pn junction diode by proton beam writing"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-05-15T20:44:05.807726+00:00"}