{"created":"2023-05-15T14:48:47.396231+00:00","id":66833,"links":{},"metadata":{"_buckets":{"deposit":"82452bd6-0afb-4be4-8ff1-b99c8d3072ae"},"_deposit":{"created_by":1,"id":"66833","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"66833"},"status":"published"},"_oai":{"id":"oai:repo.qst.go.jp:00066833","sets":["10:29"]},"author_link":["657118","657119","657120","657121","657116","657122","657125","657124","657117","657123"],"item_10005_date_7":{"attribute_name":"発表年月日","attribute_value_mlt":[{"subitem_date_issued_datetime":"2018-06-26","subitem_date_issued_type":"Issued"}]},"item_10005_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"αアリルオキシメチルアクリル酸系(AMA)重合体は、主鎖にテトラヒドロフラン(THF)環を含み、側鎖にアクリル系のカルボニルエステル(-COOR)を含むラジカル硬化性樹脂である。本研究ではAMA重合体のうちメチルAMA重合体(PMeAMA)の電子線レジストへの応用に関する調査を行った。PMeAMAがネガ型のレジストとして働くことが確認され、その感度は300-400μC/cm2であると決定された。この感度は他の非化学増幅型のレジストと同程度の感度である。また、PMeAMAの放射線誘起初期反応をナノ秒時間分解能パルスラジオリシス法を用いて調査した。PMeAMAの電子捕捉能が確認され、その反応の速度定数はPMMAとほぼ等しいことが明らかとなった。","subitem_description_type":"Abstract"}]},"item_10005_description_6":{"attribute_name":"会議概要（会議名, 開催地, 会期, 主催者等）","attribute_value_mlt":[{"subitem_description":"The 35th International Conference of Photopolymer Science and Technology","subitem_description_type":"Other"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"metadata only access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_14cb"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"保坂, 勇志"}],"nameIdentifiers":[{"nameIdentifier":"657116","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"近藤, 孝文"}],"nameIdentifiers":[{"nameIdentifier":"657117","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"大山, 智子"}],"nameIdentifiers":[{"nameIdentifier":"657118","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"内田, 朋哉"}],"nameIdentifiers":[{"nameIdentifier":"657119","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"田口, 光正"}],"nameIdentifiers":[{"nameIdentifier":"657120","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"吉田, 陽一"}],"nameIdentifiers":[{"nameIdentifier":"657121","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"鷲尾, 方一"}],"nameIdentifiers":[{"nameIdentifier":"657122","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"保坂 勇志","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"657123","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"大山 智子","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"657124","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"田口 光正","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"657125","nameIdentifierScheme":"WEKO"}]}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"conference object","resourceuri":"http://purl.org/coar/resource_type/c_c94f"}]},"item_title":"Study on Electron-beam-induced Reactions of Methyl α-Allyloxymethyl Acrylic Polymer","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Study on Electron-beam-induced Reactions of Methyl α-Allyloxymethyl Acrylic Polymer"}]},"item_type_id":"10005","owner":"1","path":["29"],"pubdate":{"attribute_name":"公開日","attribute_value":"2018-06-28"},"publish_date":"2018-06-28","publish_status":"0","recid":"66833","relation_version_is_last":true,"title":["Study on Electron-beam-induced Reactions of Methyl α-Allyloxymethyl Acrylic Polymer"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-05-15T20:44:23.445593+00:00"}