{"created":"2023-05-15T14:48:38.664390+00:00","id":66641,"links":{},"metadata":{"_buckets":{"deposit":"cc15931e-4a64-4244-ad11-af1e783d536f"},"_deposit":{"created_by":1,"id":"66641","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"66641"},"status":"published"},"_oai":{"id":"oai:repo.qst.go.jp:00066641","sets":["10:29"]},"author_link":["655362","655363"],"item_10005_date_7":{"attribute_name":"発表年月日","attribute_value_mlt":[{"subitem_date_issued_datetime":"2018-03-01","subitem_date_issued_type":"Issued"}]},"item_10005_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"レーザー励起プラズマEUV光源において、レーザー照射されたターゲットから発生するデブリの挙動を再現するために開発したラグランジ流体シミュレーションの計算手法、メッシュの動的再配置の方法、および相転移モデルと組み合わせて粒子や気泡のダイナミクスを計算する手法について議論した。","subitem_description_type":"Abstract"}]},"item_10005_description_6":{"attribute_name":"会議概要（会議名, 開催地, 会期, 主催者等）","attribute_value_mlt":[{"subitem_description":"SPIE Advanced Lithography","subitem_description_type":"Other"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"metadata only access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_14cb"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"佐々木, 明"}],"nameIdentifiers":[{"nameIdentifier":"655362","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"佐々木 明","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"655363","nameIdentifierScheme":"WEKO"}]}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"conference object","resourceuri":"http://purl.org/coar/resource_type/c_c94f"}]},"item_title":"Modeling of emission of particle debris from ablation of the tin target for the laser produced plasma extreme ultra-violet light source","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Modeling of emission of particle debris from ablation of the tin target for the laser produced plasma extreme ultra-violet light source"}]},"item_type_id":"10005","owner":"1","path":["29"],"pubdate":{"attribute_name":"公開日","attribute_value":"2018-03-12"},"publish_date":"2018-03-12","publish_status":"0","recid":"66641","relation_version_is_last":true,"title":["Modeling of emission of particle debris from ablation of the tin target for the laser produced plasma extreme ultra-violet light source"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-05-15T20:46:37.721931+00:00"}