@misc{oai:repo.qst.go.jp:00066535, author = {佐々木, 明 and 佐々木 明}, month = {Nov}, note = {"Modeling of Particle Debris from the Target of Laser Produced Plasma EUV Sources"の題名で口頭発表を行うとともに、EUV光源のプラズマ流体力学、原子過程の物理の研究者や、レーザー、光学、加速器などの技術者との情報交換を行う。, 2017 Source workshop}, title = {Modeling of Particle Debris from the Target of Laser Produced Plasma EUV Sources}, year = {2017} }