{"created":"2023-05-15T14:48:06.564503+00:00","id":65933,"links":{},"metadata":{"_buckets":{"deposit":"c1e0e4d9-8529-48df-a26b-1d7e688fb8ae"},"_deposit":{"created_by":1,"id":"65933","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"65933"},"status":"published"},"_oai":{"id":"oai:repo.qst.go.jp:00065933","sets":["10:29"]},"author_link":["649467","649466","649463","649464","649465"],"item_10005_date_7":{"attribute_name":"発表年月日","attribute_value_mlt":[{"subitem_date_issued_datetime":"2016-09-13","subitem_date_issued_type":"Issued"}]},"item_10005_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"極端紫外・軟Ｘ線領域の光学素子評価ビームライン（PF BL-11D)で軟Ｘ線ラミナーレプリカ回折格子　(Niコート)の回折効率評価実験を行った。回折格子の刻線密度は1200本/mmである。入射角が設計値の87.07°となるように回折格子を固定し，検出器を回転駆動して0～4次の回折光を検出した。波長10 nm と波長5nmでの回折効率の比較により波長10 nm における2次光の混入率を求めることができ，0.55％という十分低い値を得た。同様にしてB-K発光の波長6.76nmにて2.88％を得た。多層膜ミラー反射率計測により波長4.4nmにおける２次光混入率が8％ということもわかっている［羽多野他,第75回応用物理学会秋季学術講演会19p-A13-12(2014)]。これらの情報を用いて実測値を分光器２次光の影響を除去した値に換算した。その値は計算値より0.01低く，～1nmの表面粗さを考慮するとよく一致した。次に波長6.76nmの回折効率の入射角依存性を調べた。その結果低入射角側の82.9°で回折効率が最大になり、この場合分光器としての感度は従来設計に比較して3倍近い向上が期待できることが判った。","subitem_description_type":"Abstract"}]},"item_10005_description_6":{"attribute_name":"会議概要（会議名, 開催地, 会期, 主催者等）","attribute_value_mlt":[{"subitem_description":"第77回応用物理学会秋季学術講演会","subitem_description_type":"Other"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"metadata only access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_14cb"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"羽多野, 忠"}],"nameIdentifiers":[{"nameIdentifier":"649463","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"小池, 雅人"}],"nameIdentifiers":[{"nameIdentifier":"649464","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"浮田, 龍一"}],"nameIdentifiers":[{"nameIdentifier":"649465","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"笹井, 浩行"}],"nameIdentifiers":[{"nameIdentifier":"649466","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"小池 雅人","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"649467","nameIdentifierScheme":"WEKO"}]}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"conference object","resourceuri":"http://purl.org/coar/resource_type/c_c94f"}]},"item_title":"PF BL-11Dにおける5-10 nm領域の回折格子の回折効率評価","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"PF BL-11Dにおける5-10 nm領域の回折格子の回折効率評価"}]},"item_type_id":"10005","owner":"1","path":["29"],"pubdate":{"attribute_name":"公開日","attribute_value":"2016-07-28"},"publish_date":"2016-07-28","publish_status":"0","recid":"65933","relation_version_is_last":true,"title":["PF BL-11Dにおける5-10 nm領域の回折格子の回折効率評価"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-05-15T20:54:40.365703+00:00"}